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具有 APTMS 附着力的高质量超薄金层,可为基于表面等离子体激元的器件提供最佳性能。

High-Quality Ultrathin Gold Layers with an APTMS Adhesion for Optimal Performance of Surface Plasmon Polariton-Based Devices.

机构信息

Department of Photonics Engineering, Technical University of Denmark , Ørsteds Plads, Building 345V, DK-2800 Kongens Lyngby, Denmark.

National Centre for Micro- and Nano-Fabrication, Technical University of Denmark , Ørsteds Plads, Building 347, DK-2800 Kongens Lyngby, Denmark.

出版信息

ACS Appl Mater Interfaces. 2017 Jul 26;9(29):25049-25056. doi: 10.1021/acsami.7b07181. Epub 2017 Jul 13.

Abstract

A low-absorption adhesion layer plays a crucial role for both localized and propagating surface plasmons when ultrathin gold is used. To date, the most popular adhesion layers are metallic, namely, Cr and Ti. However, to the best of our knowledge, the influence of these adhesion layers on the behavior of propagating plasmon modes has not been thoroughly investigated nor reported in the literature. It is therefore important to study the effect of these few- to several-nanometers-thick adhesion layers on the propagating plasmons because it may affect the performance of plasmonic devices, in particular, when the Au layer is not much thicker than the adhesion layers. We experimentally compared the performances of the ultrathin gold films to show the pivotal influence of adhesion layers on highly confined propagating plasmonic modes, using Cr and 3-aminopropyl trimethoxysilane (APTMS) adhesion layers and without any adhesion layer. We show that the gold films with the APTMS adhesion layer have the lowest surface roughness and the short-range surface plasmon polaritons supported on the Au surface exhibit properties close to the theoretical calculations, considering an ideal gold film.

摘要

当使用超薄金时,低吸收粘附层对于局域和传播表面等离激元都起着至关重要的作用。迄今为止,最受欢迎的粘附层是金属,即 Cr 和 Ti。然而,据我们所知,这些粘附层对传播等离子体模式行为的影响在文献中尚未得到彻底研究和报道。因此,研究这些几纳米到几十纳米厚的粘附层对传播等离子体的影响很重要,因为这可能会影响等离子体器件的性能,特别是当 Au 层的厚度不比粘附层厚很多时。我们通过实验比较了超薄金膜的性能,结果表明,粘附层对高度限制的传播等离子体模式有重要影响,我们使用了 Cr 和 3-氨丙基三甲氧基硅烷 (APTMS) 粘附层以及没有任何粘附层的金膜。我们表明,具有 APTMS 粘附层的金膜具有最低的表面粗糙度,并且在 Au 表面上支持的短程表面等离激元极化激元表现出接近理论计算的特性,考虑到理想的金膜。

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