DTU Danchip/Cen, Technical University of Denmark , Ørsteds Plads, Building 347, 2800 Kgs. Lyngby, Denmark.
ACS Appl Mater Interfaces. 2017 Oct 25;9(42):37374-37385. doi: 10.1021/acsami.7b10136. Epub 2017 Oct 11.
Efficient adhesion of gold thin films on dielectric or semiconductor substrates is essential in applications and research within plasmonics, metamaterials, 2D materials, and nanoelectronics. As a consequence of the relentless downscaling in nanoscience and technology, the thicknesses of adhesion layer and overlayer have reached tens of nanometers, and it is unclear if our current understanding is sufficient. In this report, we investigated how Cr and Ti adhesion layers influence the nanostructure of 2-20 nm thin Au films by means of high-resolution electron microscopy, complemented with atomic force microscopy and X-ray photoelectron spectroscopy. Pure Au films were compared to Ti/Au and Cr/Au bilayer systems. Both Ti and Cr had a striking impact on grain size and crystal orientation of the Au overlayer, which we interpret as the adhesion layer-enhanced wetting of Au and the formation of chemical bonds between the layers. Ti formed a uniform layer under the Au overlayer. Cr interdiffused with the Au layer forming a Cr-Au alloy. The crystal orientation of the Au layers was mainly [111] for all thin-film systems. The results showed that both adhesion layers were partially oxidized, and oxidation sources were scrutinized and found. A difference in bilayer electrical resistivity between Ti/Au and Cr/Au systems was measured and compared. On the basis of these results, a revised and more detailed adhesion layer model for both Ti/Au and Cr/Au systems was proposed. Finally, the implications of the results were analyzed, and recommendations for the selection of adhesion layers for nano-optics and nanoelectronics applications are presented.
在等离子体学、超材料、二维材料和纳米电子学等应用和研究中,金薄膜在电介质或半导体衬底上的高效附着至关重要。由于纳米科学和技术的不断缩小,附着层和覆盖层的厚度已达到数十纳米,我们目前的理解是否足够还不清楚。在本报告中,我们通过高分辨率电子显微镜研究了 Cr 和 Ti 附着层如何影响 2-20nm 厚的 Au 薄膜的纳米结构,并用原子力显微镜和 X 射线光电子能谱进行了补充。我们将纯 Au 薄膜与 Ti/Au 和 Cr/Au 双层系统进行了比较。Ti 和 Cr 对 Au 覆盖层的晶粒尺寸和晶体取向都有显著影响,我们将其解释为附着层增强的 Au 润湿性和层间化学键的形成。Ti 在 Au 覆盖层下形成了一层均匀的层。Cr 与 Au 层互扩散形成 Cr-Au 合金。所有薄膜系统中 Au 层的晶体取向主要为[111]。结果表明,两种附着层都部分氧化了,并且对氧化源进行了仔细的研究和发现。还测量和比较了 Ti/Au 和 Cr/Au 系统的双层电阻率差异。基于这些结果,提出了 Ti/Au 和 Cr/Au 系统的改进和更详细的附着层模型。最后,分析了结果的影响,并提出了用于纳米光学和纳米电子学应用的附着层选择建议。