电化学电子束光刻：按需写入、读取和擦除金属纳米晶体。
Electrochemical electron beam lithography: Write, read, and erase metallic nanocrystals on demand.
作者信息
Park Jeung Hun, Steingart Daniel A, Kodambaka Suneel, Ross Frances M
机构信息
Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA.
Department of Mechanical and Aerospace Engineering, and Andlinger Center for Energy and the Environment, Princeton University, Princeton, NJ 08544, USA.
出版信息
Sci Adv. 2017 Jul 12;3(7):e1700234. doi: 10.1126/sciadv.1700234. eCollection 2017 Jul.
We develop a solution-based nanoscale patterning technique for site-specific deposition and dissolution of metallic nanocrystals. Nanocrystals are grown at desired locations by electron beam-induced reduction of metal ions in solution, with the ions supplied by dissolution of a nearby electrode via an applied potential. The nanocrystals can be "erased" by choice of beam conditions and regrown repeatably. We demonstrate these processes via in situ transmission electron microscopy using Au as the model material and extend to other metals. We anticipate that this approach can be used to deposit multicomponent alloys and core-shell nanostructures with nanoscale spatial and compositional resolutions for a variety of possible applications.
我们开发了一种基于溶液的纳米级图案化技术，用于金属纳米晶体的特定位置沉积和溶解。通过电子束诱导溶液中金属离子的还原，使纳米晶体在所需位置生长，金属离子由附近电极通过施加电势溶解提供。通过选择束流条件，纳米晶体可以被“擦除”并可重复生长。我们使用金作为模型材料，通过原位透射电子显微镜证明了这些过程，并扩展到其他金属。我们预计，这种方法可用于沉积具有纳米级空间和成分分辨率的多组分合金和核壳纳米结构，以实现各种可能的应用。
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