Nugroho Ferry Anggoro Ardy, Frost Rickard, Antosiewicz Tomasz J, Fritzsche Joachim, Larsson Langhammer Elin M, Langhammer Christoph
Department of Physics, Chalmers University of Technology , 412 96 Göteborg, Sweden.
Centre of New Technologies, University of Warsaw , Banacha 2c, 02-097 Warsaw, Poland.
ACS Sens. 2017 Jan 27;2(1):119-127. doi: 10.1021/acssensors.6b00612. Epub 2016 Dec 20.
Nanoplasmonic sensors typically comprise arrangements of noble metal nanoparticles on a dielectric support. Thus, they are intrinsically characterized by surface topography with corrugations at the 10-100 nm length scale. While irrelevant in some bio- and chemosensing applications, it is also to be expected that the surface topography significantly influences the interaction between solids, fluids, nanoparticles and (bio)molecules, and the nanoplasmonic sensor surface. To address this issue, we present a wafer-scale nanolithography-based fabrication approach for high-temperature compatible, chemically inert, topographically flat, and laterally homogeneous nanoplasmonic sensor chips. We demonstrate their sensing performance on three different examples, for which we also carry out a direct comparison with a traditional nanoplasmonic sensor with representative surface corrugation. Specifically, we (i) quantify the film-thickness dependence of the glass transition temperature in poly(methyl metacrylate) thin films, (ii) characterize the adsorption and specific binding kinetics of the avidin-biotinylated bovine serum albumin protein system, and (iii) analyze supported lipid bilayer formation on SiO surfaces.
纳米等离子体传感器通常由介电载体上的贵金属纳米颗粒排列组成。因此，它们的固有特征是表面形貌在10 - 100纳米长度尺度上有波纹。虽然在一些生物和化学传感应用中无关紧要，但也可以预期表面形貌会显著影响固体、流体、纳米颗粒和（生物）分子之间以及纳米等离子体传感器表面的相互作用。为了解决这个问题，我们提出了一种基于晶圆级纳米光刻的制造方法，用于制造高温兼容、化学惰性、形貌平坦且横向均匀的纳米等离子体传感器芯片。我们在三个不同的例子中展示了它们的传感性能，并且还与具有代表性表面波纹的传统纳米等离子体传感器进行了直接比较。具体来说，我们（i）量化聚（甲基丙烯酸甲酯）薄膜中玻璃化转变温度对膜厚度的依赖性，（ii）表征抗生物素蛋白 - 生物素化牛血清白蛋白蛋白系统的吸附和特异性结合动力学，以及（iii）分析SiO表面上支持的脂质双层的形成。
