Department of Materials Science & Engineering, ‡Department of Electrical Engineering, and §Department of Chemical Engineering, Stanford University , Stanford, California 94305, United States.
ACS Nano. 2017 Aug 22;11(8):7925-7937. doi: 10.1021/acsnano.7b02458. Epub 2017 Aug 1.
Stretchable form factors enable electronic devices to conform to irregular 3D structures, including soft and moving entities. Intrinsically stretchable devices have potential advantages of high surface coverage of active devices, improved durability, and reduced processing costs. This work describes intrinsically stretchable transistors composed of single-walled carbon nanotube (SWNT) electrodes and semiconductors and a dielectric that consists of a nonpolar elastomer. The use of a nonpolar elastomer dielectric enabled hysteresis-free device characteristics. Compared to devices on SiO dielectrics, stretchable devices with nonpolar dielectrics showed lower mobility in ambient conditions because of the absence of doping from water. The effect of a SWNT band gap on device characteristics was investigated by using different SWNT sources as the semiconductor. Large-band-gap SWNTs exhibited trap-limited behavior caused by the low capacitance of the dielectric. In contrast, high-current devices based on SWNTs with smaller band gaps were more limited by contact resistance. Of the tested SWNT sources, SWNTs with a maximum diameter of 1.5 nm performed the best, with a mobility of 15.4 cm/Vs and an on/off ratio >10 for stretchable transistors. Large-band-gap devices showed increased sensitivity to strain because of a pronounced dependence on the dielectric thickness, whereas contact-limited devices showed substantially less strain dependence.
可拉伸的外形因素使电子设备能够适应不规则的 3D 结构,包括柔软和运动的实体。本质上可拉伸的设备具有高有源器件表面覆盖率、提高耐用性和降低加工成本的潜在优势。本工作描述了由单壁碳纳米管 (SWNT) 电极和半导体以及由非极性弹性体组成的介电材料组成的本质上可拉伸晶体管。使用非极性弹性体介电材料实现了无滞后的器件特性。与在 SiO 介电材料上的器件相比,由于缺乏来自水的掺杂,具有非极性介电材料的可拉伸器件在环境条件下表现出较低的迁移率。通过使用不同的 SWNT 源作为半导体来研究 SWNT 带隙对器件特性的影响。大带隙 SWNTs 表现出由于介电常数低而导致的陷阱限制行为。相比之下,基于带隙较小的 SWNTs 的大电流器件受到接触电阻的限制更大。在所测试的 SWNT 源中,最大直径为 1.5nm 的 SWNT 表现最好,可拉伸晶体管的迁移率为 15.4cm/Vs,导通/关断比>10。大带隙器件由于对介电层厚度的显著依赖性而表现出对应变的更高灵敏度,而接触限制的器件对应变的依赖性则小得多。