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基于超薄陶瓷膜的柔性混合电位型（MPT）二氧化氮传感器。

Flexible Mixed-Potential-Type (MPT) NO₂ Sensor Based on An Ultra-Thin Ceramic Film.

作者信息

You Rui, Jing Gaoshan, Yu Hongyan, Cui Tianhong

机构信息

State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China.

Department of Precision Instrument, Tsinghua University, Beijing 100084, China.

出版信息

Sensors (Basel). 2017 Jul 29;17(8):1740. doi: 10.3390/s17081740.

DOI:10.3390/s17081740
PMID:28758933
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5579568/
Abstract

A novel flexible mixed-potential-type (MPT) sensor was designed and fabricated for NO₂ detection from 0 to 500 ppm at 200 °C. An ultra-thin Y₂O₃-doped ZrO₂ (YSZ) ceramic film 20 µm thick was sandwiched between a heating electrode and reference/sensing electrodes. The heating electrode was fabricated by a conventional lift-off process, while the porous reference and the sensing electrodes were fabricated by a two-step patterning method using shadow masks. The sensor's sensitivity is achieved as 58.4 mV/decade at the working temperature of 200 °C, as well as a detection limit of 26.7 ppm and small response time of less than 10 s at 200 ppm. Additionally, the flexible MPT sensor demonstrates superior mechanical stability after bending over 50 times due to the mechanical stability of the YSZ ceramic film. This simply structured, but highly reliable flexible MPT NO₂ sensor may lead to wide application in the automobile industry for vehicle emission systems to reduce NO₂ emissions and improve fuel efficiency.

摘要

设计并制造了一种新型柔性混合电位型（MPT）传感器，用于在200℃下检测0至500 ppm的二氧化氮。一层20μm厚的超薄氧化钇掺杂氧化锆（YSZ）陶瓷膜夹在加热电极与参比/传感电极之间。加热电极采用传统的剥离工艺制造，而多孔参比电极和传感电极则采用使用荫罩的两步光刻法制造。该传感器在200℃的工作温度下灵敏度达到58.4 mV/十倍频程，检测限为26.7 ppm，在200 ppm时响应时间小于10 s。此外，由于YSZ陶瓷膜的机械稳定性，柔性MPT传感器在弯曲50次以上后仍表现出优异的机械稳定性。这种结构简单但可靠性高的柔性MPT二氧化氮传感器可能会在汽车行业的车辆排放系统中得到广泛应用，以减少二氧化氮排放并提高燃油效率。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a796/5579568/a687e4af34ba/sensors-17-01740-g018.jpg
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