Nanochemistry Department and ‡Materials Characterization Facility, Istituto Italiano di Tecnologia , Via Morego 30, 16163 Genova, Italy.
J Am Chem Soc. 2017 Sep 27;139(38):13250-13259. doi: 10.1021/jacs.7b05888. Epub 2017 Aug 22.
In the past couple of decades, colloidal inorganic nanocrystals (NCs) and, more specifically, semiconductor quantum dots (QDs) have emerged as crucial materials for the development of nanoscience and nanotechnology, with applications in very diverse areas such as optoelectronics and biotechnology. Films made of inorganic NCs deposited on a substrate can be patterned by e-beam lithography, altering the structure of their capping ligands and thus allowing exposed areas to remain on the substrate while non-exposed areas are redispersed in a solvent, as in a standard lift-off process. This methodology can be described as a "direct" lithography process, since the exposure is performed directly on the material of interest, in contrast with conventional lithography which uses a polymeric resist as a mask for subsequent material deposition (or etching). A few reports from the late 1990s and early 2000s used such direct lithography to fabricate electrical wires from metallic NCs. However, the poor conductivity obtained through this process hindered the widespread use of the technique. In the early 2010s, the same method was used to define fluorescent patterns on QD films, allowing for further applications in biosensing. For the past 2-3 years, direct lithography on NC films with e-beams and X-rays has gone through an important development as it has been demonstrated that it can tune further transformations on the NCs, leading to more complex patternings and opening a whole new set of possible applications. This Perspective summarizes the findings of the past 20 years on direct lithography on NC films with a focus on the latest developments on QDs from 2014 and provides different potential future outcomes of this promising technique.
在过去的几十年里,胶体无机纳米晶体(NCs),尤其是半导体量子点(QDs),已经成为纳米科学和纳米技术发展的关键材料,在光电和生物技术等多个领域有着广泛的应用。在衬底上沉积的无机 NCs 薄膜可以通过电子束光刻进行图案化,改变其配体的结构,从而使暴露的区域留在衬底上,而未暴露的区域则在溶剂中重新分散,就像标准的剥离过程一样。这种方法可以被描述为一种“直接”光刻工艺,因为曝光是直接在感兴趣的材料上进行的,与传统光刻技术不同,后者使用聚合物抗蚀剂作为后续材料沉积(或蚀刻)的掩模。20 世纪 90 年代末和 21 世纪初的一些报告使用这种直接光刻技术来制造金属 NC 的电线。然而,通过这种工艺获得的导电性差阻碍了该技术的广泛应用。在 21 世纪 10 年代早期,同样的方法被用于在 QD 薄膜上定义荧光图案,从而进一步应用于生物传感。在过去的 2-3 年中,电子束和 X 射线对 NC 薄膜的直接光刻技术取得了重要进展,因为它已经证明可以进一步调整 NCs 的转变,从而实现更复杂的图案化,并开辟一整套新的潜在应用。本文总结了过去 20 年关于 NC 薄膜的直接光刻技术的研究结果,重点介绍了 2014 年以来 QD 的最新进展,并提供了该有前途技术的不同潜在未来结果。