• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

银掺杂对射频磁控共溅射系统制备的ZnO薄膜的影响。

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System.

作者信息

Liu Fang-Cheng, Li Jyun-Yong, Chen Tai-Hong, Chang Chun-How, Lee Ching-Ting, Hsiao Wei-Hua, Liu Day-Shan

机构信息

Institute of Electro-Optical and Materials Science, National Formosa University, Yunlin 63201, Taiwan.

Additive Manufacturing and Laser Application, Industrial Technology Research Institute, Tainan 73445, Taiwan.

出版信息

Materials (Basel). 2017 Jul 14;10(7):797. doi: 10.3390/ma10070797.

DOI:10.3390/ma10070797
PMID:28773159
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5551840/
Abstract

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (Ag) and the formation of the Ag aggregations (Ag⁰) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a -type conduction was achievable after annealing at 350 °C under air ambient for 1 h.

摘要

采用射频磁控共溅射系统，使用银（Ag）和氧化锌（ZnO）的共溅射靶材，制备了具有不同银原子比（Ag/(Ag + Zn)原子百分比）的Ag-ZnO共溅射薄膜。通过X射线衍射（XRD）、拉曼散射和X射线光电子能谱（XPS）测量，研究了氧化锌基体中银受主（Ag）的激活以及银团聚体（Ag⁰）的形成。在350°C空气环境下退火1小时后，Ag-ZnO共溅射薄膜可实现p型导电行为。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/c2a5a1f2edba/materials-10-00797-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/97a9ad206cb1/materials-10-00797-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/578a0c355307/materials-10-00797-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/95e110057bad/materials-10-00797-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/c7a5fd0c5f59/materials-10-00797-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/39dc6a6000b1/materials-10-00797-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/b790863e85de/materials-10-00797-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/b6eabb1b6944/materials-10-00797-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/c2a5a1f2edba/materials-10-00797-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/97a9ad206cb1/materials-10-00797-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/578a0c355307/materials-10-00797-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/95e110057bad/materials-10-00797-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/c7a5fd0c5f59/materials-10-00797-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/39dc6a6000b1/materials-10-00797-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/b790863e85de/materials-10-00797-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/b6eabb1b6944/materials-10-00797-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9bf6/5551840/c2a5a1f2edba/materials-10-00797-g008.jpg

相似文献

1
Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System.银掺杂对射频磁控共溅射系统制备的ZnO薄膜的影响。
Materials (Basel). 2017 Jul 14;10(7):797. doi: 10.3390/ma10070797.
2
[Photoluminescence of Silicon Nitride-Based ZnO Thin Film Developed with RF Magnetron Sputtering].[射频磁控溅射制备的氮化硅基氧化锌薄膜的光致发光]
Guang Pu Xue Yu Guang Pu Fen Xi. 2017 Feb;37(2):391-3.
3
Impact of Silver Incorporation and Flash-Lamp-Annealing on the Photocatalytic Response of Sputtered ZnO Films.银的掺入和闪光灯退火对溅射ZnO薄膜光催化响应的影响
Nanomaterials (Basel). 2024 Sep 19;14(18):1519. doi: 10.3390/nano14181519.
4
Improvement of the Space Charge Suppression and Hydrophobicity Property of Cellulose Insulation Pressboard by Surface Sputtering a ZnO/PTFE Functional Film.通过表面溅射ZnO/PTFE功能薄膜改善纤维素绝缘纸板的空间电荷抑制和疏水性
Polymers (Basel). 2019 Oct 3;11(10):1610. doi: 10.3390/polym11101610.
5
Physical properties of metal-doped zinc oxide films for surface acoustic wave application.用于表面声波应用的金属掺杂氧化锌薄膜的物理性质
Nanoscale Res Lett. 2012 Jan 5;7(1):25. doi: 10.1186/1556-276X-7-25.
6
Nanostructured ZnO/Ag Film Prepared by Magnetron Sputtering Method for Fast Response of Ammonia Gas Detection.磁控溅射法制备纳米结构 ZnO/Ag 薄膜用于氨气气体的快速响应检测。
Molecules. 2020 Apr 20;25(8):1899. doi: 10.3390/molecules25081899.
7
Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles.具有不同生长角度的射频磁控溅射ZnO薄膜的结构和光学性质
Nanoscale Res Lett. 2012 Jan 5;7(1):55. doi: 10.1186/1556-276X-7-55.
8
Resistive Switching Characteristics of Li-Doped ZnO Thin Films Based on Magnetron Sputtering.基于磁控溅射的锂掺杂氧化锌薄膜的电阻开关特性
Materials (Basel). 2019 Apr 18;12(8):1282. doi: 10.3390/ma12081282.
9
Effects of Thermal Annealing on the Properties of Zirconium-Doped MgZnO Films Obtained through Radio-Frequency Magnetron Sputtering.热退火对通过射频磁控溅射制备的锆掺杂MgZnO薄膜性能的影响
Membranes (Basel). 2021 May 20;11(5):373. doi: 10.3390/membranes11050373.
10
Microstructure and optical properties of Ag-doped ZnO nanostructures prepared by a wet oxidation doping process.Ag 掺杂 ZnO 纳米结构的微观结构和光学性质通过湿氧化掺杂工艺制备。
Nanotechnology. 2011 Mar 11;22(10):105706. doi: 10.1088/0957-4484/22/10/105706. Epub 2011 Feb 2.

引用本文的文献

1
Impact of Silver Incorporation and Flash-Lamp-Annealing on the Photocatalytic Response of Sputtered ZnO Films.银的掺入和闪光灯退火对溅射ZnO薄膜光催化响应的影响
Nanomaterials (Basel). 2024 Sep 19;14(18):1519. doi: 10.3390/nano14181519.
2
Defect minimized Ag-ZnO microneedles for photocatalysis.缺陷最小化的 Ag-ZnO 微米针用于光催化。
Environ Sci Pollut Res Int. 2020 Oct;27(29):37036-37043. doi: 10.1007/s11356-020-09433-5. Epub 2020 Jun 23.
3
Enhancement on the Surface Hydrophobicity and Oleophobicity of an Organosilicon Film by Conformity Deposition and Surface Fluorination Etching.

本文引用的文献

1
Hydrothermal Growth of Vertically Aligned ZnO Nanorods Using a Biocomposite Seed Layer of ZnO Nanoparticles.使用ZnO纳米颗粒的生物复合种子层水热生长垂直排列的ZnO纳米棒
Materials (Basel). 2013 Aug 19;6(8):3584-3597. doi: 10.3390/ma6083584.
2
Localized surface plasmon resonances dominated giant lateral photovoltaic effect observed in ZnO/Ag/Si nanostructure.在ZnO/Ag/Si纳米结构中观察到局部表面等离子体共振主导的巨大横向光伏效应。
Sci Rep. 2016 Mar 11;6:22906. doi: 10.1038/srep22906.
3
Realization of Cu-Doped p-Type ZnO Thin Films by Molecular Beam Epitaxy.
通过共形沉积和表面氟化蚀刻增强有机硅薄膜的表面疏水性和疏油性
Materials (Basel). 2018 Jun 26;11(7):1089. doi: 10.3390/ma11071089.
4
Effect of Target Composition and Sputtering Deposition Parameters on the Functional Properties of Nitrogenized Ag-Permalloy Flexible Thin Films Deposited on Polymer Substrates.靶材成分和溅射沉积参数对沉积在聚合物基底上的氮化坡莫合金柔性薄膜功能特性的影响。
Materials (Basel). 2018 Mar 17;11(3):439. doi: 10.3390/ma11030439.
通过分子束外延实现铜掺杂的p型氧化锌薄膜
ACS Appl Mater Interfaces. 2015 Apr 29;7(16):8894-9. doi: 10.1021/acsami.5b01564. Epub 2015 Apr 14.
4
The simple hydrothermal synthesis of Ag-ZnO-SnO2 nanochain and its multiple applications.Ag-ZnO-SnO2 纳米链的简易水热合成及其多种应用。
Dalton Trans. 2013 Dec 14;42(46):16365-74. doi: 10.1039/c3dt51192h.
5
Enhanced ultraviolet emission and improved spatial distribution uniformity of ZnO nanorod array light-emitting diodes via Ag nanoparticles decoration.通过 Ag 纳米粒子修饰提高 ZnO 纳米棒阵列发光二极管的紫外发射和改善空间分布均匀性。
Nanoscale. 2013 Sep 21;5(18):8634-9. doi: 10.1039/c3nr02844e.
6
Room temperature polariton lasing vs. photon lasing in a ZnO-based hybrid microcavity.基于氧化锌的混合微腔中室温极化激元激光与光子激光的对比
Opt Express. 2012 Feb 27;20(5):5530-7. doi: 10.1364/OE.20.005530.