Bao Yiliang, Zhou Feng, LeBrun Thomas W, Gorman Jason J
Opt Express. 2017 Jun 26;25(13):15493-15503. doi: 10.1364/OE.25.015493.
A detailed study of the fabrication of silicon concave micromirrors for hemispherical microcavities is presented that includes fabrication yield, surface quality, surface roughness, cavity depth, radius of curvature, and the aspect ratio between the cavity depth and radius of curvature. Most importantly, it is shown that much larger cavity depths are possible than previously reported while achieving desirable aspect ratios and nanometer-level roughness. This should result in greater frequency stability and improved insensitivity to fabrication variations for the mode coupling optics. Spectral results for an assembled hemispherical microcavity are presented, demonstrating that high finesse and quality factor are achieved with these micromirrors, F = 1524 and Q = 3.78 x 10, respectively.
本文详细研究了用于半球形微腔的硅凹面微镜的制造工艺，包括制造良率、表面质量、表面粗糙度、腔深、曲率半径以及腔深与曲率半径之间的纵横比。最重要的是，研究表明，在实现理想纵横比和纳米级粗糙度的同时，可以获得比先前报道的大得多的腔深。这将带来更高的频率稳定性，并提高模式耦合光学器件对制造变化的不敏感性。文中给出了组装后的半球形微腔的光谱结果，表明这些微镜实现了高精细度和品质因数，精细度F = 1524，品质因数Q = 3.78×10⁵。
