Shi Yunbo, Guo Hao, Yang Jiangtao, Zhao Miaomiao, Liu Jun, Xue Chenyang, Tang Jun
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, Shanxi, China.
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, Shanxi, China.
Materials (Basel). 2015 Jun 24;8(7):3806-3814. doi: 10.3390/ma8073806.
In this work, the wafer-scale silver nanoparticles fabricated by a self-assembly method was demonstrated based on a magnetron sputtering and plasma treatment process. Silver nanoparticles of different sizes and shapes were prepared, and the effects of the plasma treatment time, plasma gas composition, and power were systematically investigated to develop a method for low-cost and large-scale fabrication of silver nanoparticles. Furthermore, the surface-enhanced Raman scattering experiments: crystal violet, as the probe, was absorbed on the silver nanoparticles film of different size and density, and get the phenomena of surface-enhanced Raman scattering and surface-enhanced fluorescence. The results show that the proposed technique provides a rapid method for the fabrication of silver nanomaterial; the method is adaptable to large-scale production and is compatible with the fabrication of other materials and biosensors.
在这项工作中，展示了基于磁控溅射和等离子体处理工艺通过自组装方法制备的晶圆级银纳米颗粒。制备了不同尺寸和形状的银纳米颗粒，并系统地研究了等离子体处理时间、等离子体气体成分和功率的影响，以开发一种低成本、大规模制备银纳米颗粒的方法。此外，进行了表面增强拉曼散射实验：以结晶紫为探针，将其吸附在不同尺寸和密度的银纳米颗粒薄膜上，观察到表面增强拉曼散射和表面增强荧光现象。结果表明，所提出的技术为银纳米材料的制备提供了一种快速方法；该方法适用于大规模生产，并且与其他材料和生物传感器的制造兼容。
