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用于化学传感的超薄透气氧化物膜:纳米多孔Ta₂O₅测试研究

Ultrathin Gas Permeable Oxide Membranes for Chemical Sensing: Nanoporous Ta₂O₅ Test Study.

作者信息

Imbault Alexander, Wang Yue, Kruse Peter, Strelcov Evgheni, Comini Elisabetta, Sberveglieri Giorgio, Kolmakov Andrei

机构信息

Department of Chemistry and Chemical Biology, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4M1, Canada.

Oak Ridge National Laboratory, Institute for Functional Imaging of Materials and Center for Nanophase Materials Sciences, Oak Ridge, TN 37831, USA.

出版信息

Materials (Basel). 2015 Sep 25;8(10):6677-6684. doi: 10.3390/ma8105333.

DOI:10.3390/ma8105333
PMID:28793592
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5455363/
Abstract

Conductometric gas sensors made of gas permeable metal oxide ultrathin membranes can combine the functions of a selective filter, preconcentrator, and sensing element and thus can be particularly promising for the active sampling of diluted analytes. Here we report a case study of the electron transport and gas sensing properties of such a membrane made of nanoporous Ta₂O₅. These membranes demonstrated a noticeable chemical sensitivity toward ammonia, ethanol, and acetone at high temperatures above 400 °C. Different from traditional thin films, such gas permeable, ultrathin gas sensing elements can be made suspended enabling advanced architectures of ultrasensitive analytical systems operating at high temperatures and in harsh environments.

摘要

由透气金属氧化物超薄膜制成的电导式气体传感器可以兼具选择性过滤器、预浓缩器和传感元件的功能,因此对于稀释分析物的主动采样而言可能特别有前景。在此,我们报告了一个关于由纳米多孔Ta₂O₅制成的此类薄膜的电子传输和气体传感特性的案例研究。这些薄膜在400℃以上的高温下对氨、乙醇和丙酮表现出显著的化学敏感性。与传统薄膜不同,这种透气的超薄气体传感元件可以制成悬浮式的,从而实现能够在高温和恶劣环境下运行的超灵敏分析系统的先进架构。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/0c3d9038852f/materials-08-05333-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/1faf5d57a63d/materials-08-05333-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/cf3999db4860/materials-08-05333-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/0940037dcc57/materials-08-05333-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/0c3d9038852f/materials-08-05333-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/1faf5d57a63d/materials-08-05333-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/cf3999db4860/materials-08-05333-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/0940037dcc57/materials-08-05333-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0078/5455363/0c3d9038852f/materials-08-05333-g004.jpg

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