Schröder Stefan, Ababii Nicolai, Brînză Mihai, Magariu Nicolae, Zimoch Lukas, Bodduluri Mani Teja, Strunskus Thomas, Adelung Rainer, Faupel Franz, Lupan Oleg
Multicomponent Materials, Department of Materials Science, Faculty of Engineering, Kiel University, Kaiserstraße 2, D-24143 Kiel, Germany.
Center for Nanotechnology and Nanosensors, Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Moldova.
Polymers (Basel). 2023 Jan 19;15(3):524. doi: 10.3390/polym15030524.
Metal oxide gas sensors are of great interest for applications ranging from lambda sensors to early hazard detection in explosive media and leakage detection due to their superior properties with regard to sensitivity and lifetime, as well as their low cost and portability. However, the influence of ambient gases on the gas response, energy consumption and selectivity still needs to be improved and they are thus the subject of intensive research. In this work, a simple approach is presented to modify and increase the selectivity of gas sensing structures with an ultrathin polymer thin film. The different gas sensing surfaces, CuO, AlO/CuO and TiO are coated with a conformal < 30 nm Poly(1,3,5,7-tetramethyl-tetravinyl cyclotetrasiloxane) (PV4D4) thin film via solvent-free initiated chemical vapor deposition (iCVD). The obtained structures demonstrate a change in selectivity from ethanol vapor to 2-propanol vapor and an increase in selectivity compared to other vapors of volatile organic compounds. In the case of TiO structures coated with a PV4D4 thin film, the increase in selectivity to 2-propanol vapors is observed even at relatively low operating temperatures, starting from >200 °C. The present study demonstrates possibilities for improving the properties of metal oxide gas sensors, which is very important in applications in fields such as medicine, security and food safety.
金属氧化物气体传感器因其在灵敏度、寿命方面的优越性能，以及低成本和便携性，在从氧传感器到爆炸介质中的早期危险检测和泄漏检测等各种应用中备受关注。然而，环境气体对气体响应、能量消耗和选择性的影响仍有待改善，因此它们是深入研究的对象。在这项工作中，提出了一种简单的方法，用超薄聚合物薄膜来修饰和提高气敏结构的选择性。通过无溶剂引发化学气相沉积（iCVD），在不同的气敏表面，即CuO、AlO/CuO和TiO上涂覆一层<30 nm的聚（1,3,5,7 - 四甲基 - 四乙烯基环四硅氧烷）（PV4D4）保形薄膜。所得到的结构显示出从乙醇蒸汽到2 - 丙醇蒸汽的选择性变化，并且与挥发性有机化合物的其他蒸汽相比选择性有所提高。在涂有PV4D4薄膜的TiO结构的情况下，即使在相对较低的操作温度（从>200°C开始）下，也观察到对2 - 丙醇蒸汽的选择性增加。本研究证明了改善金属氧化物气体传感器性能的可能性，这在医学、安全和食品安全等领域的应用中非常重要。
