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用于高性能有机薄膜晶体管的低温溶液法制备的栅极电介质

Low-Temperature Solution-Processed Gate Dielectrics for High-Performance Organic Thin Film Transistors.

作者信息

Kim Jaekyun, Park Chang Jun, Yi Gyeongmin, Choi Myung-Seok, Park Sung Kyu

机构信息

Department of Applied Materials Engineering, Hanbat National University, Daejeon 305-719, Korea.

School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 156-756, Korea.

出版信息

Materials (Basel). 2015 Oct 12;8(10):6926-6934. doi: 10.3390/ma8105352.

Abstract

A low-temperature solution-processed high-k gate dielectric layer for use in a high-performance solution-processed semiconducting polymer organic thin-film transistor (OTFT) was demonstrated. Photochemical activation of sol-gel-derived AlOx films under 150 °C permitted the formation of a dense film with low leakage and relatively high dielectric-permittivity characteristics, which are almost comparable to the results yielded by the conventionally used vacuum deposition and high temperature annealing method. Octadecylphosphonic acid (ODPA) self-assembled monolayer (SAM) treatment of the AlO was employed in order to realize high-performance (>0.4 cm²/Vs saturation mobility) and low-operation-voltage (<5 V) diketopyrrolopyrrole (DPP)-based OTFTs on an ultra-thin polyimide film (3-μm thick). Thus, low-temperature photochemically-annealed solution-processed AlO film with SAM layer is an attractive candidate as a dielectric-layer for use in high-performance organic TFTs operated at low voltages.

摘要

展示了一种用于高性能溶液处理半导体聚合物有机薄膜晶体管(OTFT)的低温溶液处理高k栅极介电层。在150°C下对溶胶 - 凝胶衍生的AlOx薄膜进行光化学活化,可形成具有低泄漏和相对高介电常数特性的致密薄膜,这几乎与传统使用的真空沉积和高温退火方法所得到的结果相当。为了在超薄聚酰亚胺薄膜(3μm厚)上实现基于二酮吡咯并吡咯(DPP)的高性能(>0.4 cm²/Vs饱和迁移率)和低工作电压(<5 V)的OTFT,采用了十八烷基膦酸(ODPA)自组装单分子层(SAM)对AlO进行处理。因此,具有SAM层的低温光化学退火溶液处理AlO薄膜是一种有吸引力的候选材料,可作为用于低电压运行的高性能有机TFT的介电层。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c140/5455382/c6609f48a9ee/materials-08-05352-g001.jpg

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