Liu Zhaowu, Li Wenhao, Li Xiaotian, Jiang Shan, Song Ying, Lv Qiang
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, 130033, China.
University of Chinese Academy of Science, Beijing, 101408, China.
Sci Rep. 2017 Aug 15;7(1):8173. doi: 10.1038/s41598-017-07741-4.
We designed a new system that eliminates deviations by correcting uncertainty in optical distance measurements in the laser two-color heterodyne interferometer. In simulations, eliminating the uncertainty from the atmosphere, the deviation in the uncertainty of the optical distance was 50 times greater with the two-color method than with the one-color method. Adding a correction arm reduces the deviation caused by the uncertainties in measured optical distances. The uncertainty in the measured path length is reduced to 20 nm over a path length of 1500 mm, giving a relative uncertainty of 1.34 × 10 .
我们设计了一种新系统，该系统通过校正激光双色外差干涉仪中光学距离测量的不确定性来消除偏差。在模拟中，消除大气中的不确定性后，双色法中光学距离不确定性的偏差比单色法大50倍。增加一个校正臂可减少由测量光学距离的不确定性引起的偏差。在1500毫米的路径长度上，测量路径长度的不确定性降低到20纳米，相对不确定性为1.34×10 。
