Department of Medical Bionics, The University of Melbourne, Parkville, Melbourne, VIC, 3010, Australia.
Bionics Institute, 384 Albert St, East Melbourne, VIC, 3002, Australia.
Biomed Microdevices. 2017 Aug 26;19(4):79. doi: 10.1007/s10544-017-0220-1.
Wireless power and data transfer to medical implants is a research area where improvements in current state-of-the-art technologies are needed owing to the continuing efforts for miniaturization. At present, lithographical patterning of evaporated metals is widely used for miniature coil fabrication. This method produces coils that are limited to low micron or nanometer thicknesses leading to high impedance values and thus limiting their potential quality. In the present work we describe a novel technique, whereby trenches were milled into a diamond substrate and filled with silver active braze alloy, enabling the manufacture of small, high cross-section, low impedance microcoils capable of transferring up to 10 mW of power up to a distance of 6 mm. As a substitute for a metallic braze line used for hermetic sealing, a continuous metal loop when placed parallel and close to the coil surface reduced power transfer efficiency by 43%, but not significantly, when placed perpendicular to the microcoil surface. Encapsulation of the coil by growth of a further layer of diamond reduced the quality factor by an average of 38%, which can be largely avoided by prior oxygen plasma treatment. Furthermore, an accelerated ageing test after encapsulation showed that these coils are long lasting. Our results thus collectively highlight the feasibility of fabricating a high-cross section, biocompatible and long lasting miniaturized microcoil that could be used in either a neural recording or neuromuscular stimulation device.
无线电能和数据传输到医疗植入物是一个研究领域,由于不断努力实现小型化,需要改进当前的最先进技术。目前,蒸发金属的光刻图形被广泛用于微型线圈的制造。这种方法产生的线圈仅限于低微米或纳米厚度,导致高阻抗值,从而限制了它们的潜在质量。在本工作中,我们描述了一种新颖的技术,通过在钻石衬底中铣出沟槽并用银活性钎焊合金填充,从而制造出能够传输高达 10 mW 功率的小、高横截面积、低阻抗微线圈,距离可达 6 毫米。作为用于密封的金属钎焊线的替代品,当平行且靠近线圈表面放置时,连续的金属环会使功率传输效率降低 43%,但当垂直于微线圈表面放置时,这种降低并不显著。通过进一步生长一层钻石来封装线圈,会使品质因数平均降低 38%,但通过预先进行氧等离子体处理可以在很大程度上避免这种情况。此外,封装后的加速老化测试表明,这些线圈具有持久的性能。因此,我们的结果共同强调了制造高横截面积、生物相容性和持久的小型化微线圈的可行性,这种微线圈可用于神经记录或神经肌肉刺激设备。