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GaN 金属透镜实现可见光像素级全彩路由。

GaN Metalens for Pixel-Level Full-Color Routing at Visible Light.

机构信息

Department of Physics, National Taiwan University , Taipei 10617, Taiwan.

Research Center for Applied Sciences, Academia Sinica , Taipei 11529, Taiwan.

出版信息

Nano Lett. 2017 Oct 11;17(10):6345-6352. doi: 10.1021/acs.nanolett.7b03135. Epub 2017 Sep 18.

Abstract

Metasurface-based components are known to be one of the promising candidates for developing flat optical systems. However, their low working efficiency highly limits the use of such flat components for feasible applications. Although the introduction of the metallic mirror has been demonstrated to successfully enhance the efficiency, it is still somehow limited for imaging and sensing applications because they are only available for devices operating in a reflection fashion. Here, we demonstrate three individual GaN-based metalenses working in a transmission window with extremely high operation efficiency at visible light (87%, 91.6%, and 50.6% for blue, green, and red light, respectively). For the proof of concept, a multiplex color router with dielectric metalens, which is capable of guiding individual primary colors into different spatial positions, is experimentally verified based on the design of out-of-plane focusing metalens. Our approach with low-cost, semiconductor fabrication compatibility and high working efficiency characteristics offers a way for establishing a complete set of flat optical components for a wide range of applications such as compact imaging sensors, optical spectroscopy, and high-resolution lithography, just named a few.

摘要

基于超表面的元件被认为是开发平面光学系统的有前途的候选者之一。然而,它们的低工作效率极大地限制了此类平面元件在可行应用中的使用。尽管已经证明引入金属镜可以成功地提高效率,但对于成像和传感应用来说,它仍然有些限制,因为它们仅适用于以反射方式工作的设备。在这里,我们展示了三个独立的基于 GaN 的金属透镜,它们在可见光波段(蓝色光为 87%,绿色光为 91.6%,红色光为 50.6%)具有极高的工作效率。为了验证概念,我们基于离轴聚焦金属透镜的设计,实验验证了具有介电金属透镜的多路复用彩色路由器,它能够将单个原色引导到不同的空间位置。我们的方法具有低成本、半导体制造兼容性和高效率的特点,为建立一整套适用于广泛应用的平面光学元件提供了一种途径,例如紧凑型成像传感器、光学光谱学和高分辨率光刻等,仅列举了其中几个。

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