Chang Kai-Hao, Chen Yen-Chun, Huang Yo-Song, Hsu Wei-Lun, Lu Guo-Hao, Liu Chao-Feng, Weng Chun-Jen, Lin Yu-Hsin, Chen Che-Chin, Lee Chien-Chieh, Chang Yu-Chi, Wang Po-Hsiang, Wang Chih-Ming
VisEra Technologies Company Limited, Hsinchu, 30078, Taiwan.
Department of Optics and Photonics, National Central University, Taoyuan, 320371, Taiwan.
Nanophotonics. 2023 Mar 8;12(7):1309-1315. doi: 10.1515/nanoph-2023-0017. eCollection 2023 Apr.
In this study, an axicon metalens comprising a large central disc surrounded by nanoposts for energy harvesting in composite metal-oxide semiconductor sensors was designed, fabricated, and experimentally characterized. The main role of the central disc is focusing light; the nanoposts of various diameters deflect light to form a Bessel-like beam. The spatial distribution of the optical transmission was measured using micro-hyperspectral imaging. The axicon metalens concentrates the light to the sensitive area of the sensor and also harvests light from adjacent pixels. After adding an axicon metalens, the normalized peak transmission is up to 250% at = 700 nm as compared to a blank TiO film. The experimental results had fair agreement with the finite-difference-time-domain simulation. The ultra-broadband energy-harvesting performance of the sensor suggests that it could be applied in surveillance and Internet of Things applications.
在本研究中，设计、制造并对一种锥透镜超颖表面进行了实验表征，该超颖表面由一个大的中心圆盘和围绕其的纳米柱组成，用于复合金属氧化物半导体传感器中的能量收集。中心圆盘的主要作用是聚焦光；不同直径的纳米柱使光发生偏转以形成类贝塞尔光束。使用微高光谱成像测量了光传输的空间分布。锥透镜超颖表面将光集中到传感器的敏感区域，还能收集相邻像素的光。与空白TiO薄膜相比，添加锥透镜超颖表面后，在λ = 700 nm处归一化峰值传输高达250%。实验结果与有限时域差分模拟结果吻合良好。该传感器的超宽带能量收集性能表明其可应用于监控和物联网应用。
