Hong Yoon Jin, Jeon Byeong Je, Ki Yu Geun, Kim Soo Jin
Department of Semiconductor Systems Engineering, Korea University, Seoul, Korea.
School of Electrical Engineering , Korea University, Seoul, Korea.
Nanophotonics. 2024 Jan 22;13(8):1407-1415. doi: 10.1515/nanoph-2023-0746. eCollection 2024 Apr.
CMOS image sensor (CIS) plays a crucial role in diverse optical applications by facilitating the capture of images in the visible and near-infrared spectra. The enhancement of image resolution in CIS by an increase in pixel density is becoming more significant and realizable with the recent progress of nanofabrication. However, as pixel size decreases towards the diffraction limit, there is an inevitable trade-off between the scale-down of pixel size and the enhancement of optical sensitivity. Recently, to overcome this, an entirely new concept of spectral sensing using a nanophotonic-based color router has been proposed. In this work, we present a metasurface-based spectral router to effectively split the spectrum from visible to near-infrared and redirect through the four optical channels to the targeted pixel surfaces. We optimize the metasurface that simultaneously controls the phases of the transmitted light of targeted spectra, i.e. red (R), green (G), blue (B), and near-infrared (NIR), which is the largest number of channels reported based on a single layered metasurface and has an optical efficiency that surpasses the efficiency of conventional color filter systems.
互补金属氧化物半导体图像传感器(CMOS)通过促进在可见光和近红外光谱中捕获图像,在各种光学应用中发挥着至关重要的作用。随着纳米制造技术的最新进展,通过增加像素密度来提高CMOS图像传感器的图像分辨率变得越来越重要且可行。然而,随着像素尺寸朝着衍射极限减小,在像素尺寸缩小和光学灵敏度增强之间存在不可避免的权衡。最近,为了克服这一问题,人们提出了一种基于纳米光子颜色路由器的全新光谱传感概念。在这项工作中,我们展示了一种基于超表面的光谱路由器,它能够有效地将从可见光到近红外的光谱进行分离,并通过四个光学通道重定向到目标像素表面。我们优化了超表面,该超表面同时控制目标光谱(即红色(R)、绿色(G)、蓝色(B)和近红外(NIR))透射光的相位,这是基于单层超表面报道的最多通道数量,并且其光学效率超过了传统滤色器系统的效率。