Lee Heung-Shik, Cho Chongdu, Cho Myeong-Woo
Department of Mechanical Engineering, Inha University, Incheon 402-751, Korea.
Sensors (Basel). 2007 Oct 9;7(10):2174-2182. doi: 10.3390/s7102174.
We have developed a wireless-controlled compact optical switch by siliconmicromachining techniques with DC magnetron sputtering. For the optical switchingoperation, micro mirror is designed as cantilever shape size of 5mm×800μm×50μm.TbDyFe film is sputter-deposited on the upper side of the mirror with the condition as: Argas pressure below 1.2×10 torr, DC input power of 180W and heating temperature of up to250°C for the wireless control of each component. Mirrors are actuated by externallyapplied magnetic fields for the micro application. Applied beam path can be changedaccording to the direction and the magnitude of applied magnetic field. Reflectivity changes,M-H curves and X-ray diffractions of sputtered mirrors are measured to determine magneto-optical, magneto-elastic properties with variation in sputtered film thickness. The deflectedangle-magnetic field characteristics of the fabricated mirror are measured.
我们通过采用直流磁控溅射的硅微加工技术开发了一种无线控制的紧凑型光开关。对于光开关操作，微镜设计为悬臂形状，尺寸为5mm×800μm×50μm。在以下条件下，将TbDyFe薄膜溅射沉积在微镜的上侧：氩气压力低于1.2×10托，直流输入功率为180W，加热温度高达250°C，以便对每个组件进行无线控制。微镜由外部施加的磁场驱动，用于微应用。根据施加磁场的方向和大小，可以改变应用光束路径。测量溅射微镜的反射率变化、M-H曲线和X射线衍射，以确定磁光、磁弹性特性随溅射膜厚度的变化。测量所制造微镜的偏转角-磁场特性。
