三腔可调谐微机电系统法布里-珀罗干涉仪

Three Cavity Tunable MEMS Fabry Perot Interferometer.

作者信息

Parashar Avinash, Shah Ankur, Packirisamy Muthukumaran, Sivakumar Narayanswamy

机构信息

Department of Mechanical and Industrial Engineering, EV 13-310, Concordia University, 1515, St. Catherine West, Montreal, Quebec, Canada H3G 2W1.

出版信息

Sensors (Basel). 2007 Dec 4;7(12):3071-3083. doi: 10.3390/s7123071.

DOI:10.3390/s7123071

PMID:28903280

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3841881/

Abstract

In this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately considered for the tuning. In case one,tuning was achieved by deflecting mirror 2 only and in case two, both mirrors 2 and 3 weredeflected for the tuning of the FPI.

摘要

本文提出了一种具有数学模型的四镜可调谐微机电系统（MEMS）法布里-珀罗干涉仪（FPI）概念。所提出的FPI的光谱范围位于2400至4018纳米的红外光谱范围内。通过偏转两个中间镜（或通过改变三个腔的长度）可以对FPI进行精细调谐。调谐分别考虑了两种不同的情况。在第一种情况下，仅通过偏转镜2来实现调谐，而在第二种情况下，为了对FPI进行调谐，镜2和镜3都进行了偏转。