Liu Wanpeng, Zhou Zhitao, Zhang Shaoqing, Shi Zhifeng, Tabarini Justin, Lee Woonsoo, Zhang Yeshun, Gilbert Corder S N, Li Xinxin, Dong Fei, Cheng Liang, Liu Mengkun, Kaplan David L, Omenetto Fiorenzo G, Zhang Guozheng, Mao Ying, Tao Tiger H
Department of Mechanical EngineeringThe University of Texas at Austin Austin TX 78712 USA.
State Key Laboratory of Transducer Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China.
Adv Sci (Weinh). 2017 Jul 6;4(9):1700191. doi: 10.1002/advs.201700191. eCollection 2017 Sep.
Precise patterning of biomaterials has widespread applications, including drug release, degradable implants, tissue engineering, and regenerative medicine. Patterning of protein-based microstructures using UV-photolithography has been demonstrated using protein as the resist material. The Achilles heel of existing protein-based biophotoresists is the inevitable wide molecular weight distribution during the protein extraction/regeneration process, hindering their practical uses in the semiconductor industry where reliability and repeatability are paramount. A wafer-scale high resolution patterning of bio-microstructures using well-defined silk fibroin light chain as the resist material is presented showing unprecedent performances. The lithographic and etching performance of silk fibroin light chain resists are evaluated systematically and the underlying mechanisms are thoroughly discussed. The micropatterned silk structures are tested as cellular substrates for the successful spatial guidance of fetal neural stems cells seeded on the patterned substrates. The enhanced patterning resolution, the improved etch resistance, and the inherent biocompatibility of such protein-based photoresist provide new opportunities in fabricating large scale biocompatible functional microstructures.
生物材料的精确图案化具有广泛的应用,包括药物释放、可降解植入物、组织工程和再生医学。利用紫外线光刻技术对基于蛋白质的微观结构进行图案化已得到证实,该技术使用蛋白质作为抗蚀材料。现有基于蛋白质的生物光致抗蚀剂的致命弱点是在蛋白质提取/再生过程中不可避免地存在较宽的分子量分布,这阻碍了它们在可靠性和可重复性至关重要的半导体工业中的实际应用。本文展示了使用定义明确的丝素蛋白轻链作为抗蚀材料对生物微观结构进行晶圆级高分辨率图案化,展现出了前所未有的性能。系统评估了丝素蛋白轻链抗蚀剂的光刻和蚀刻性能,并深入讨论了其潜在机制。对微图案化的丝绸结构作为细胞基质进行了测试,成功地对接种在图案化基质上的胎儿神经干细胞进行了空间引导。这种基于蛋白质的光致抗蚀剂提高的图案化分辨率、改进的抗蚀刻性和固有的生物相容性为制造大规模生物相容性功能微观结构提供了新的机会。