Muttikulangara Sanathanan S, Baranski Maciej, Rehman Shakil, Hu Liangxing, Miao Jianmin
School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.
Singapore-MIT Alliance for Research and Technology (SMART), 1 CREATE Way, Singapore 138602, Singapore.
Sensors (Basel). 2017 Oct 17;17(10):2372. doi: 10.3390/s17102372.
Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 μ m at 40 V . Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments.
衍射光栅是光谱学、计量学和激光等应用中最常用的光学元件之一。制造光栅采用了多种方法，包括微机电系统（MEMS）制造，目前该方法已经成熟，并且通过包含驱动机制为可调谐光栅提供了机会。我们设计、建模、制造并测试了一种基于硅的具有相对高分辨率的间距可调衍射光栅（PTG），该光栅可部署在星载成像光谱仪中，例如皮卫星中。我们基于质量弹簧系统对PTG进行了详细的分析建模。该器件的有效填充因子为52%，分辨率为84。静电驱动提供的调谐在40V时导致2.7μm的位移。此外，我们对制造的结构进行了振动测试，以评估其用于星载仪器的可行性。
