Park Young Jae, Her Man Jae, Jeong Youngjae, Choi Dong Ju, Kim Dong Uk, Lim Min Gi, Hong Myung Seok, Kwon Hyug Su, Yu Kyoungsik, Han Sangyoon
Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu, 42988, Republic of Korea.
School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.
Microsyst Nanoeng. 2024 Aug 29;10(1):119. doi: 10.1038/s41378-024-00728-y.
The Fabry-Pérot interferometer, a fundamental component in optoelectronic systems, offers interesting applications such as sensors, lasers, and filters. In this work, we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors (SLRs) and phase shifters based on electrostatic microelectromechanical (MEMS) actuator. The fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication processes. This electrostatic actuation mechanism provides well-balanced, scalable pathways for efficient tuning methodologies. The extinction ratio of the continuously tunable SLRs' reflectivity is larger than 20 dB. Full 2π phase shifting is achieved, and response times of all the components are less than 25 μs. Both actuators have extremely low static power, measuring under 20 fW and the energy needed for tuning is both below 20 pJ.
法布里-珀罗干涉仪是光电系统中的一个基本组件，具有诸如传感器、激光器和滤波器等有趣的应用。在这项工作中，我们展示了一种可调谐法布里-珀罗腔，它由基于静电微机电（MEMS）致动器的可调谐萨格纳克环反射器（SLR）和移相器组成。该器件的制造工艺与标准的晶圆级硅光子学制造工艺兼容。这种静电驱动机制为高效调谐方法提供了平衡、可扩展的途径。连续可调谐SLR反射率的消光比大于20 dB。实现了完整的2π相移，所有组件的响应时间均小于25 μs。两个致动器的静态功耗极低，测量值低于20 fW，调谐所需的能量均低于20 pJ。
