Hashimoto Masaaki, Taguchi Yoshihiro
School of Integrated Design Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama, Japan.
Research Fellow of Japan Society for the Promotion of Science, 5-3-1 Kojimachi, Tokyo, Japan.
Micromachines (Basel). 2020 Mar 30;11(4):362. doi: 10.3390/mi11040362.
Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are strategically placed to generate large displacement. The freestanding electrothermal kirigami film with a 2 mm diameter and high fill factor is completely fabricated by careful stress control in the MEMS process. A 200 μm vertical displacement with 131 mW and a 20 Hz responsive frequency is experimentally demonstrated as a unique function of electrothermal kirigami film. The proposed design, fabrication process, and experimental test validate the proposed scanner's feasibility and potential for large-displacement scanning with a high fill factor.
大位移微机电系统（MEMS）扫描仪在各种光学应用中需求旺盛。日本传统的剪纸和折纸艺术——kirigami，是一种很有前景的用于制造平面外结构的工程方法。本文探讨了一种受kirigami启发的电热MEMS扫描仪的可行性和潜力，该扫描仪通过平面外薄膜驱动实现大的垂直位移。所提出的扫描仪由适合电热自重构折叠和展开的薄膜材料组成，并且在策略性位置设置了微尺度薄膜切口以产生大位移。通过在MEMS工艺中仔细控制应力，完全制造出了直径为2 mm且填充因子高的独立式电热kirigami薄膜。实验证明，作为电热kirigami薄膜的独特功能，该薄膜在131 mW功率和20 Hz响应频率下可实现200μm的垂直位移。所提出的设计、制造工艺和实验测试验证了所提出的扫描仪在高填充因子下进行大位移扫描的可行性和潜力。
