Yamada Itsunari, Ikeda Yusuke
Appl Opt. 2017 Jun 10;56(17):5054-5059. doi: 10.1364/AO.56.005054.
A zirconia diffraction grating with high diffraction efficiency was fabricated using a soft imprinting technique and a sol-gel method. The imprinting process involved dropping zirconia nanoparticle dispersion onto a silicone (polydimethylsiloxane) mold, which was transferred from the patterned photoresist grating through the molding process. The first-order diffraction transmittance of the fabricated zirconia gel grating with a 1.0-μm pitch and a depth of 0.58 μm reached 29.4% at a wavelength of 632.8 nm (zeroth-order transmittance: 18.1%). This high aspect ratio grating can be fabricated in a simpler manner and at lower cost compared to conventional gratings.
采用软压印技术和溶胶-凝胶法制备了具有高衍射效率的氧化锆衍射光栅。压印过程包括将氧化锆纳米颗粒分散液滴到硅酮（聚二甲基硅氧烷）模具上，该模具是通过成型工艺从图案化的光刻胶光栅转移而来的。所制备的间距为1.0μm、深度为0.58μm的氧化锆凝胶光栅在波长632.8nm处的一级衍射透射率达到29.4%（零级透射率：18.1%）。与传统光栅相比，这种高深宽比光栅能够以更简单的方式、更低的成本制备。
