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利用微通道中的液态金属形成三维电极用于三轴电容式力传感器。

Three-dimensional Electrodes formation using liquid metal in micro channels for 3-axis Capacitive Force Sensor.

作者信息

Nagatomo Tatsuho, Miki Norihisa

出版信息

Annu Int Conf IEEE Eng Med Biol Soc. 2017 Jul;2017:1579-1582. doi: 10.1109/EMBC.2017.8037139.

DOI:10.1109/EMBC.2017.8037139
PMID:29060183
Abstract

In this study, we propose three-dimensional formation of electrodes made of liquid metal. First, three-dimensional micro channels are formed by stacking PDMS layers. Second, liquid metal, galinstan, is introduced into the channels to form electrodes and wirings. This process is crucial to develop miniaturized 3-axis capacitive force sensor. In our previous work, we proposed a ball-point-pen like capacitive sensor, however, it was difficult to be miniaturized to be mounted onto an endoscope retaining the function. We successfully manufactured 3-axis cylindrical capacitive force sensor, 5 mm in diameter and small enough to be mounted onto an endoscope. We experimentally characterized the sensor. The proposed and demonstrated sensor can be readily applicable for endoscopic palpation.

摘要

在本研究中,我们提出了由液态金属制成的电极的三维成型方法。首先,通过堆叠聚二甲基硅氧烷(PDMS)层形成三维微通道。其次,将液态金属镓铟锡引入通道中以形成电极和布线。这一过程对于开发小型化的三轴电容式力传感器至关重要。在我们之前的工作中,我们提出了一种类似圆珠笔的电容式传感器,然而,很难将其小型化以安装在内窥镜上并保持其功能。我们成功制造了直径为5毫米的三轴圆柱形电容式力传感器,其尺寸小到足以安装在内窥镜上。我们对该传感器进行了实验表征。所提出并展示的传感器可很容易地应用于内镜触诊。

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