基于衍射光学的大型凸非球面表面改性检测方法

Modified surface testing method for large convex aspheric surfaces based on diffraction optics.

作者信息

Zhang Haidong, Wang Xiaokun, Xue Donglin, Zhang Xuejun

出版信息

Appl Opt. 2017 Dec 1;56(34):9398-9405. doi: 10.1364/AO.56.009398.

DOI:10.1364/AO.56.009398

Abstract

Large convex aspheric optical elements have been widely applied in advanced optical systems, which have presented a challenging metrology problem. Conventional testing methods cannot satisfy the demand gradually with the change of definition of "large." A modified method is proposed in this paper, which utilizes a relatively small computer-generated hologram and an illumination lens with certain feasibility to measure the large convex aspherics. Two example systems are designed to demonstrate the applicability, and also, the sensitivity of this configuration is analyzed, which proves the accuracy of the configuration can be better than 6 nm with careful alignment and calibration of the illumination lens in advance. Design examples and analysis show that this configuration is applicable to measure the large convex aspheric surfaces.

摘要

大型凸非球面光学元件已广泛应用于先进光学系统中，这带来了具有挑战性的计量问题。随着“大型”定义的变化，传统测试方法逐渐无法满足需求。本文提出了一种改进方法，该方法利用相对较小的计算全息图和具有一定可行性的照明透镜来测量大型凸非球面。设计了两个示例系统来证明其适用性，并且还分析了这种配置的灵敏度，结果表明，通过预先仔细对准和校准照明透镜，该配置的精度可以优于6纳米。设计示例和分析表明，这种配置适用于测量大型凸非球面表面。