Tian Zhihui, Yang Wang, Sui Yongxin, Kang Yusi, Liu Weiqi, Yang Huaijiang
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China.
Opt Express. 2012 May 7;20(10):10761-75. doi: 10.1364/OE.20.010761.
We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation.
我们提出了一种用于大屈光度凸球面高精度面形测量的相移干涉仪的新型光学配置。描述了根据测量精度、实用性和系统误差分析的结构和设计考虑因素。更详细地说，我们展示了关键部件的设计原理和方法。其中一些通过示例进行阐述以便透彻理解。还描述了测量程序和对准方法。最后，进一步进行了验证实验以验证我们的理论设计。该系统在保持相对低成本和操作方便的同时，能进行全孔径和高精度的表面检测。
