Ogi Jun, Kato Yuri, Matoba Yoshihisa, Yamane Chigusa, Nagahata Kazunori, Nakashima Yusaku, Kishimoto Takuya, Hashimoto Shigeki, Maari Koichi, Oike Yusuke, Ezaki Takayuki
Research Division, Sony Semiconductor Solutions Corporation, 4-14-1 Asahi-cho, Atsugi-shi, Kanagawa 243-0014, Japan.
Bio-Medical Research and Development Department, R&D Platform, Sony Corporation, 1-5-45 Yushima, Bunkyo-ku, Tokyo 113-0034, Japan.
Biointerphases. 2017 Dec 19;12(5):05F402. doi: 10.1116/1.4997358.
A 24-μm-pitch microelectrode array (MEA) with 6912 readout channels at 12 kHz and 23.2-μV random noise is presented. The aim is to reduce noise in a "highly scalable" MEA with a complementary metal-oxide-semiconductor integration circuit (CMOS-MEA), in which a large number of readout channels and a high electrode density can be expected. Despite the small dimension and the simplicity of the in-pixel circuit for the high electrode-density and the relatively large number of readout channels of the prototype CMOS-MEA chip developed in this work, the noise within the chip is successfully reduced to less than half that reported in a previous work, for a device with similar in-pixel circuit simplicity and a large number of readout channels. Further, the action potential was clearly observed on cardiomyocytes using the CMOS-MEA. These results indicate the high-scalability of the CMOS-MEA. The highly scalable CMOS-MEA provides high-spatial-resolution mapping of cell action potentials, and the mapping can aid understanding of complex activities in cells, including neuron network activities.
本文展示了一种间距为24μm的微电极阵列(MEA),具有6912个读出通道,采样频率为12kHz,随机噪声为23.2μV。其目的是通过互补金属氧化物半导体集成电路(CMOS-MEA)来降低“高度可扩展”的MEA中的噪声,在这种电路中,可以预期有大量的读出通道和高电极密度。尽管本工作中开发的原型CMOS-MEA芯片的像素内电路尺寸小且简单,具有高电极密度和相对大量的读出通道,但对于具有类似像素内电路简单性和大量读出通道的器件,芯片内的噪声成功降低到低于先前工作报道值的一半。此外,使用CMOS-MEA在心肌细胞上清晰地观察到了动作电位。这些结果表明了CMOS-MEA的高可扩展性。高度可扩展的CMOS-MEA提供了细胞动作电位的高空间分辨率映射,并且该映射有助于理解细胞中的复杂活动,包括神经网络活动。