Department of Electrical Engineering, Stanford University, Stanford, CA 94305.
Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305
Proc Natl Acad Sci U S A. 2018 Jan 23;115(4):685-689. doi: 10.1073/pnas.1717882115. Epub 2018 Jan 8.
Metal structures on insulators are essential components in advanced electronic and nanooptical systems. Their electronic and optical properties are closely tied to their crystal quality, due to the strong dependence of carrier transport and band structure on defects and grain boundaries. Here we report a method for creating patterned single-crystal metal microstructures on amorphous insulating substrates, using liquid phase epitaxy. In this process, the patterned metal microstructures are encapsulated in an insulating crucible, together with a small seed of a differing material. The system is heated to temperatures above the metal melting point, followed by cooling and metal crystallization. During the heating process, the metal and seed form a high-melting-point solid solution, which directs liquid epitaxial metal growth. High yield of single-crystal metal with different sizes is confirmed with electron backscatter diffraction images, after removing the insulating crucible. Unexpectedly, the metal microstructures crystallize with the [Formula: see text] direction normal to the plane of the film. This platform technology will enable the large-scale integration of high-performance plasmonic and electronic nanosystems.
在先进的电子和纳米光学系统中,绝缘体上的金属结构是必不可少的组成部分。由于载流子输运和能带结构对缺陷和晶界有很强的依赖性,因此它们的电子和光学性质与晶体质量密切相关。在这里,我们报告了一种使用液相外延在非晶绝缘衬底上制造图案化单晶金属微结构的方法。在这个过程中,图案化的金属微结构被封装在一个绝缘坩埚中,同时还有一个不同材料的小种子。将系统加热到高于金属熔点的温度,然后冷却并使金属结晶。在加热过程中,金属和种子形成高熔点固溶体,指导液态外延金属生长。在去除绝缘坩埚后,通过电子背散射衍射图像确认了具有不同尺寸的单晶金属的高产量。出乎意料的是,金属微结构以[Formula: see text]方向结晶,垂直于薄膜平面。这项平台技术将能够实现高性能等离子体和电子纳米系统的大规模集成。