Trudeau Charles, Dion-Bertrand Laura-Isabelle, Mukherjee Sankha, Martel Richard, Cloutier Sylvain G
Department of Electrical Engineering, École de Technologie Supérieure, 1100 Notre-Dame Ouest, Montréal, QC H3C 1K3, Canada.
R&D Department, Phonon Etc., 5795 Avenue de Gaspé, Montréal QC H2S 2X3, Canada.
Materials (Basel). 2018 Jan 12;11(1):116. doi: 10.3390/ma11010116.
This work describes a method for electrostatic deposition of graphene over a large area using controlled electrostatic exfoliation from a Highly Ordered Pyrolytic Graphite (HOPG) block. Deposition over 130 × 130 µm² with 96% coverage is achieved, which contrasts with sporadic micro-scale depositions of graphene with little control from previous works on electrostatic deposition. The deposition results are studied by Raman micro-spectroscopy and hyperspectral analysis using large fields of view to allow for the characterization of the whole deposition area. Results confirm that laser pre-patterning of the HOPG block prior to cleaving generates anchor points favoring a more homogeneous and defect-free HOPG surface, yielding larger and more uniform graphene depositions. We also demonstrate that a second patterning of the HOPG block just before exfoliation can yield features with precisely controlled geometries.
这项工作描述了一种通过从高度有序热解石墨（HOPG）块进行可控静电剥离来在大面积上静电沉积石墨烯的方法。实现了在130×130 µm²的区域上进行沉积，覆盖率达96%，这与之前关于静电沉积的工作中石墨烯的零星微尺度沉积且几乎无法控制形成了对比。通过拉曼显微光谱和使用大视场的高光谱分析来研究沉积结果，以便对整个沉积区域进行表征。结果证实，在劈开之前对HOPG块进行激光预图案化会产生有利于形成更均匀且无缺陷的HOPG表面的锚点，从而产生更大且更均匀的石墨烯沉积。我们还证明，在剥离之前对HOPG块进行第二次图案化可以产生具有精确控制几何形状的特征。
