Shanghai Ultra-Precision Optical Manufacturing Engineering Center, Department of Optical Science and Engineering, ‡Collaborative Innovation Center of Advanced Microstructures, State Key Laboratory of Surface Physics and Department of Physics, and §Applied Ion Beam Physics Laboratory, Institute of Modern Physics, Department of Nuclear Science and Technology, Fudan University , Shanghai 200433, China.
ACS Appl Mater Interfaces. 2018 Feb 7;10(5):5061-5071. doi: 10.1021/acsami.7b16542. Epub 2018 Jan 25.
The microstructured and hyperdoped silicon as a superior photoelectric and photovoltaic material is first studied as a gas-sensing material. The material is prepared by femtosecond-laser irradiation on selenium-coated silicon and then fabricated as a conductive gas sensor, targeting ammonia. At room temperature, the sensitivity, response time, repeatability, distinguishability, selectivity, and natural aging effect of the sensor have been systematically studied. Results show that such black silicon has good potential for application as an ammonia-sensing material. On the basis of its unique optoelectronic properties, an additional optical drive is proposed for the formation of an optical and electric dual-driven sensor, which is achieved by asymmetric light illumination between the two electrode regions. In a certain range of applied voltage, the sensitivity is enhanced dramatically and even tends to be infinite. For the aged device with degraded sensitivity, a two-order increment is obtained for 500 ppm of NH under the extra optical drive. A mechanism based on Dember effect is proposed for explaining such a phenomenon.
将微结构和高掺杂硅作为一种优异的光电和光伏材料，首次将其作为气体传感材料进行研究。该材料是通过飞秒激光照射硒涂层硅制备而成，并将其制作成用于检测氨气的导电气体传感器。在室温下，系统研究了传感器的灵敏度、响应时间、重复性、可区分性、选择性和自然老化效应。结果表明，这种黑硅在作为氨敏材料方面具有良好的应用潜力。基于其独特的光电特性，提出了一种光学和电力双驱动传感器的附加光学驱动，通过两个电极区域之间的不对称光照射来实现。在一定的外加电压范围内，灵敏度显著增强，甚至趋于无穷大。对于灵敏度下降的老化器件，在额外的光学驱动下，500ppm 的 NH 可获得两个数量级的增强。提出了基于 Dember 效应的机制来解释这种现象。
