Chang Ye, Hui Zhipeng, Wang Xiayu, Qu Hemi, Pang Wei, Duan Xuexin
State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin 300072, China.
China Marine Development and Research Center (CMDRC), Beijing 100049, China.
Sensors (Basel). 2018 Jan 25;18(2):343. doi: 10.3390/s18020343.
In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has a significant effect on the response of the Si-NR FET sensor, and only a minor effect on the FBAR sensor. In this dual-mode system, qualitative discrimination can be achieved by analyzing polarity with the Si-NR FET and quantitative concentration information can be obtained using a polymer-coated FBAR with a detection limit at the ppm level. The complementary performance of the sensing elements provides higher analytical efficiency. Additionally, a dual mixture of two types of freons (CFC-113 and HCFC-141b) is further analyzed with the dual-mode gas sensor. Owing to the small size and complementary metal-oxide semiconductor (CMOS)-compatibility of the system, the dual-mode gas sensor shows potential as a portable integrated sensing system for the analysis of gas mixtures in the future.
在本文中，我们开发了一种新型双模式气体传感器系统，该系统由硅纳米带场效应晶体管（Si-NR FET）和薄膜体声波谐振器（FBAR）组成。我们使用极性和非极性有机化合物研究了它们的传感特性，并证明极性对Si-NR FET传感器的响应有显著影响，而对FBAR传感器只有轻微影响。在这个双模式系统中，可以通过用Si-NR FET分析极性来实现定性鉴别，并且可以使用涂有聚合物的FBAR获得ppm级检测限的定量浓度信息。传感元件的互补性能提供了更高的分析效率。此外，还使用双模式气体传感器对两种氟利昂（CFC-113和HCFC-141b）的二元混合物进行了进一步分析。由于该系统尺寸小且与互补金属氧化物半导体（CMOS）兼容，双模式气体传感器在未来作为用于分析气体混合物的便携式集成传感系统显示出潜力。
