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基于场效应晶体管的高灵敏度气体传感平台——综述

Highly sensitive gas sensing platforms based on field effect Transistor-A review.

作者信息

Zhang Pan, Xiao Yin, Zhang Jingjing, Liu Bingjie, Ma Xiaofei, Wang Yong

机构信息

School of Science, Tianjin Key Laboratory of Molecular Optoelectronic Science, Department of Chemistry, Collaborative Innovation Center of Chemical Science and Engineering, Tianjin University, Tianjin, 300072, PR China.

School of Chemical Engineering and Technology, Tianjin Engineering Research Center Functional Fine Chemical, Tianjin University, Tianjin, 300072, PR China.

出版信息

Anal Chim Acta. 2021 Aug 8;1172:338575. doi: 10.1016/j.aca.2021.338575. Epub 2021 Apr 29.

DOI:10.1016/j.aca.2021.338575
PMID:34119019
Abstract

Highly selective, sensitive and fast gas sensing has attracted increasing attention in the fields of environmental protection, industrial production, personal safety as well as medical diagnostics. Field effect transistor (FET) sensors have been extensively investigated in gas sensing fields due to their small size, high sensitivity, high reliability and low energy consumption. This comprehensive review aims to discuss the recent advances in FET gas sensors based on materials such as carbon nanotubes, silicon carbide, silicon, metal oxides-, graphene-, transition metal dichalcogenides- and 2-dimensional black phosphorus. We first introduce different types of sensor structures and elaborate the gas-sensing mechanisms. Then, we describe the optimizing strategies for sensing performances, response parameters, FET based dual-mode sensors and FET based logic circuit sensors. Moreover, we present the key advances of the above materials in gas sensing performances. Meanwhile, shortcomings of such materials are also discussed and the future development of this field is proposed in this review.

摘要

高选择性、高灵敏度和快速气体传感在环境保护、工业生产、个人安全以及医学诊断等领域已引起越来越多的关注。场效应晶体管(FET)传感器因其尺寸小、灵敏度高、可靠性高和能耗低等优点,在气体传感领域得到了广泛研究。这篇综述旨在探讨基于碳纳米管、碳化硅、硅、金属氧化物、石墨烯、过渡金属二硫属化物和二维黑磷等材料的FET气体传感器的最新进展。我们首先介绍不同类型的传感器结构,并阐述气体传感机制。然后,我们描述了传感性能、响应参数、基于FET的双模式传感器和基于FET的逻辑电路传感器的优化策略。此外,我们还介绍了上述材料在气体传感性能方面的关键进展。同时,本文也讨论了这些材料的缺点,并对该领域的未来发展提出了建议。

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