Institut für Chemie neuer Materialien, Universität Osnabrück , Barbarastr. 7, 49076 Osnabrück, Germany.
ACS Appl Mater Interfaces. 2018 Feb 28;10(8):7451-7458. doi: 10.1021/acsami.7b18163. Epub 2018 Feb 14.
Insect-inspired capillary submicron stamping and subsequent surface-limited metal-assisted chemical etching (MACE) with ammonium bifluoride as a HF source are employed for the high-throughput production of ordered topographically patterned silicon (tpSi). Insect feet often possess hairy contact elements through which adhesive secretion is deployed. Thus, arrays of adhesive secretion drops remain as footprints on contact surfaces. Stamps for insect-inspired capillary submicron stamping having surfaces topographically patterned with contact elements mimic the functional principles of such insect feet. They contain spongy continuous nanopore networks penetrating the entire stamps. Any ink (organic or aqueous) may be supplied from the backside of the nanoporous stamps to the contact elements. We generated ordered arrays of submicron AgNO dots extending square millimeters on Si by manual stamping with cycle times of a few seconds under ambient conditions; at higher load, ordered holey AgNO films were obtained. Surface-limited MACE correspondingly yielded either macroporous tpSi or Si pillar arrays. Inkjet printing of polymer solutions onto the tpSi yielded patterns of polymer blots conformally covering the tpSi. Such blot patterns could potentially represent a starting point for the development of persistent and scratch-resistant identity labels or quick response codes on silicon surfaces.
昆虫启发的毛细管亚微米冲压，随后使用氟化氢铵作为 HF 源进行表面限制的金属辅助化学蚀刻 (MACE)，用于高通量生产有序的拓扑图案化硅 (tpSi)。昆虫的脚通常具有带毛的接触元件，通过这些接触元件可以部署粘性分泌物。因此，粘性分泌物滴的阵列作为足迹留在接触表面上。用于昆虫启发的毛细管亚微米冲压的模具的表面具有拓扑图案化的接触元件，模拟了这种昆虫脚的功能原理。它们包含贯穿整个模具的海绵状连续纳米孔网络。任何油墨（有机或水性）都可以从纳米多孔模具的背面供应到接触元件。我们通过在环境条件下手动冲压几秒钟的循环时间，在 Si 上生成了扩展到几平方毫米的有序亚微米 AgNO 点阵列；在较高的负载下，得到了有序的有孔 AgNO 薄膜。相应地，表面限制的 MACE 产生了大孔 tpSi 或 Si 柱阵列。将聚合物溶液喷墨打印到 tpSi 上，得到了聚合物斑点的图案，这些斑点图案与 tpSi 完全一致。这种斑点图案可能代表在硅表面上开发持久且抗划伤的身份标签或快速响应码的起点。
