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使用激光干涉波长杠杆和动态边带锁定合成波长生成进行绝对距离测量。

Absolute distance measurement using laser interferometric wavelength leverage with a dynamic-sideband-locked synthetic wavelength generation.

作者信息

Yan Liping, Xie Jiandong, Chen Benyong, Lou Yingtian, Zhang Shihua

出版信息

Opt Express. 2021 Mar 15;29(6):8344-8357. doi: 10.1364/OE.418798.

Abstract

Absolute distance measurement with laser interferometry has the advantages of high precision and traceability to the definition of meter but its accuracy is primarily limited by the phase demodulation. Among kinds of absolute distance interferometric measurements, the multi-wavelength interferometry is widely used but seriously limited by the generation of suitable synthetic wavelength and the stability of adopted synthetic wavelength. Inspired by the mechanical lever, we hereby establish a principle of laser interferometric wavelength leverage (LIWL) for absolute distance measurement. By keeping the phase difference in two single wavelengths constant, LIWL achieves the measurement of large distance with respect to synthetic wavelengths by detecting nanometer displacement with respect to a single wavelength. The merit of LIWL is eliminating the influence of phase demodulation error. And a dynamic-sideband locking method based on a high-frequency electro-optic modulator is proposed, which can flexibly and quickly generate variable synthetic wavelengths from tens of kilometer to millimeter with high stability. Experimental setup was constructed and absolute distance measurements were performed. Experimental results show that a measurement range of 100 m with residual error of less than 15 µm has been achieved by comparing the LIWL system and an incremental laser interferometer.

摘要

采用激光干涉测量法进行绝对距离测量具有高精度以及可溯源到米定义的优点,但其精度主要受相位解调的限制。在各种绝对距离干涉测量方法中,多波长干涉测量法应用广泛,但受到合适合成波长的产生以及所采用合成波长稳定性的严重限制。受机械杠杆的启发,我们在此建立了一种用于绝对距离测量的激光干涉波长杠杆原理(LIWL)。通过保持两个单波长的相位差恒定,LIWL通过检测相对于单个波长的纳米级位移,实现了相对于合成波长的大距离测量。LIWL的优点是消除了相位解调误差的影响。并且提出了一种基于高频电光调制器的动态边带锁定方法,该方法能够灵活、快速地产生从几十千米到毫米的可变合成波长,且具有高稳定性。构建了实验装置并进行了绝对距离测量。实验结果表明,通过将LIWL系统与增量式激光干涉仪进行比较,实现了100米的测量范围,残余误差小于15微米。

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