Wang Shuangyue, Yan Hongwei, Li Dengji, Qiao Liang, Han Shaobo, Yuan Xiaodong, Liu Wei, Xiang Xia, Zu Xiaotao
Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, People's Republic of China.
China Academy of Engineering Physics, Mianyang, 621900, China.
Nanoscale Res Lett. 2018 Feb 12;13(1):49. doi: 10.1186/s11671-018-2442-4.
Dual-layer and tri-layer broadband antireflective (AR) films with excellent transmittance were successfully fabricated using base-/acid-catalyzed mixed sols and propylene oxide (PO) modified silica sols. The sols and films were characterized by scanning electron microscope (SEM), Fourier transform infrared spectroscopy (FTIR), nuclear magnetic resonance (NMR), transmission electron microscope (TEM), and scanning transmission electron microscope (STEM). FTIR and TEM results suggest that the PO molecules were covalently bonded to the silica particles and the bridge structure existing in PO modified silica sol is responsible for the low density of the top layer. The density ratio between different layers was measured by cross-sectional STEM, and the results are 1.69:1 and 2.1:1.7:1 from bottom-layer to top-layer for dual-layer and tri-layer films, respectively. The dual-layer film demonstrates good stability with 99.8% at the central wavelength of 351 nm and nearly 99.5% at the central wavelength of 1053 nm in laser system, and for the tri-layer AR film, the maximum transmittance reached nearly 100% at both the central wavelengths of 527 and 1053 nm.
利用碱/酸催化混合溶胶和环氧丙烷（PO）改性二氧化硅溶胶成功制备了具有优异透过率的双层和三层宽带抗反射（AR）薄膜。通过扫描电子显微镜（SEM）、傅里叶变换红外光谱（FTIR）、核磁共振（NMR）、透射电子显微镜（TEM）和扫描透射电子显微镜（STEM）对溶胶和薄膜进行了表征。FTIR和TEM结果表明，PO分子与二氧化硅颗粒共价键合，PO改性二氧化硅溶胶中存在的桥连结构导致顶层密度较低。通过截面STEM测量了不同层之间的密度比，双层和三层薄膜从底层到顶层的密度比分别为1.69:1和2.1:1.7:1。双层薄膜在激光系统中，在中心波长351nm处具有99.8%的良好稳定性，在中心波长1053nm处接近99.5%；对于三层增透膜，在527和1053nm的中心波长处最大透过率均达到近100%。
