一种基于MEMS SOI的压阻式流体流量传感器。

A MEMS SOI-based piezoresistive fluid flow sensor.

作者信息

Tian B, Li H F, Yang H, Song D L, Bai X W, Zhao Y L

机构信息

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, China.

College of Information Science and Engineering, Ocean University of China, Qingdao, Shandong, China.

出版信息

Rev Sci Instrum. 2018 Feb;89(2):025001. doi: 10.1063/1.5022279.

DOI:10.1063/1.5022279

PMID:29495812

Abstract

In this paper, a SOI (silicon-on-insulator)-based piezoresistive fluid flow sensor is presented; the presented flow sensor mainly consists of a nylon sensing head, stainless steel cantilever beam, SOI sensor chip, printed circuit board, half-cylinder gasket, and stainless steel shell. The working principle of the sensor and some detailed contrastive analysis about the sensor structure were introduced since the nylon sensing head and stainless steel cantilever beam have distinct influence on the sensor performance; the structure of nylon sensing head and stainless steel cantilever beam is also discussed. The SOI sensor chip was fabricated using micro-electromechanical systems technologies, such as reactive ion etching and low pressure chemical vapor deposition. The designed fluid sensor was packaged and tested; a calibration installation system was purposely designed for the sensor experiment. The testing results indicated that the output voltage of the sensor is proportional to the square of the fluid flow velocity, which is coincident with the theoretical derivation. The tested sensitivity of the sensor is 3.91 × 10 V ms/kg.

摘要

本文介绍了一种基于绝缘体上硅（SOI）的压阻式流体流量传感器；所介绍的流量传感器主要由尼龙传感头、不锈钢悬臂梁、SOI传感器芯片、印刷电路板、半圆柱垫圈和不锈钢外壳组成。由于尼龙传感头和不锈钢悬臂梁对传感器性能有显著影响，介绍了传感器的工作原理以及对传感器结构的一些详细对比分析；还讨论了尼龙传感头和不锈钢悬臂梁的结构。SOI传感器芯片采用微机电系统技术制造，如反应离子刻蚀和低压化学气相沉积。对设计的流体传感器进行了封装和测试；专门为传感器实验设计了校准安装系统。测试结果表明，传感器的输出电压与流体流速的平方成正比，这与理论推导一致。传感器的测试灵敏度为3.91×10 V·ms/kg。