Han Yu, Li Qiang, Ng Kar Wei, Zhu Si, Lau Kei May
Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
Nanotechnology. 2018 Jun 1;29(22):225601. doi: 10.1088/1361-6528/aab53b. Epub 2018 Mar 8.
We report the growth of vertically stacked InGaAs/InP quantum wires on (001) Si substrates with adjustable room-temperature emission at telecom bands. Based on a self-limiting growth mode in selective area metal-organic chemical vapor deposition, crescent-shaped InGaAs quantum wires with variable dimensions are embedded within InP nano-ridges. With extensive transmission electron microscopy studies, the growth transition and morphology change from quantum wires to ridge quantum wells (QWs) have been revealed. As a result, we are able to decouple the quantum wires from ridge QWs and manipulate their dimensions by scaling the growth time. With minimized lateral dimension and their unique positioning, the InGaAs/InP quantum wires are more immune to dislocations and more efficient in radiative processes, as evidenced by their excellent optical quality at telecom-bands. These promising results thus highlight the potential of combining low-dimensional quantum wire structures with the aspect ratio trapping process for integrating III-V nano-light emitters on mainstream (001) Si substrates.
我们报道了在(001)硅衬底上垂直堆叠的InGaAs/InP量子线的生长情况,其在电信波段具有可调节的室温发射。基于选择性区域金属有机化学气相沉积中的自限制生长模式,尺寸可变的月牙形InGaAs量子线被嵌入InP纳米脊内。通过广泛的透射电子显微镜研究,揭示了从量子线到脊量子阱(QW)的生长转变和形态变化。因此,我们能够将量子线与脊量子阱解耦,并通过缩放生长时间来操纵它们的尺寸。由于横向尺寸最小化及其独特的定位,InGaAs/InP量子线对位错更具抗性,并且在辐射过程中更高效,这在它们在电信波段的优异光学质量中得到了证明。这些有前景的结果因此突出了将低维量子线结构与纵横比捕获工艺相结合,用于在主流(001)硅衬底上集成III-V族纳米发光体的潜力。