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基于多模脊形波导的超高Q值硅微环谐振器的设计与演示

Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide.

作者信息

Zhang Yuguang, Hu Xiao, Chen Daigao, Wang Lei, Li Miaofeng, Feng Peng, Xiao Xi, Yu Shaohua

出版信息

Opt Lett. 2018 Apr 1;43(7):1586-1589. doi: 10.1364/OL.43.001586.

DOI:10.1364/OL.43.001586
PMID:29601036
Abstract

We present the design and experimental demonstration of the ultra-high-Q-factor silicon microring resonator based on a multi-mode ridge waveguide. The multi-mode ridge waveguide is designed to decrease the propagation loss and to improve the Q factor. The ultra-high Q factor of 1.1×10 is experimentally demonstrated, with the free spectrum range of 0.208 nm. The single-mode ridge waveguide is used in the coupling region to reduce the dimension of the microring resonator, and the bend radius is only 20 μm. To precisely control the resonance wavelength, a small heater is implemented on the silicon microring resonator with the tuning efficiency of 7.1  pm/mW. The degenerate four-wave mixing of the silicon microring resonator is investigated, and the conversion efficiency is measured to be -15.5  dB without optimizing the dispersion of the microring resonator and carriers extraction.

摘要

我们展示了基于多模脊形波导的超高品质因数硅微环谐振器的设计与实验验证。多模脊形波导旨在降低传播损耗并提高品质因数。实验验证了1.1×10的超高品质因数,自由光谱范围为0.208纳米。在耦合区域使用单模脊形波导以减小微环谐振器的尺寸,弯曲半径仅为20微米。为精确控制谐振波长,在硅微环谐振器上实现了一个小型加热器,调谐效率为7.1皮米/毫瓦。研究了硅微环谐振器的简并四波混频,在未优化微环谐振器色散和载流子提取的情况下,测得的转换效率为-15.5分贝。

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