Zeng Desheng, Liu Qiang, Mei Chenyang, Li Hongwei, Huang Qingzhong, Zhang Xinliang
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China.
Micromachines (Basel). 2022 Jul 21;13(7):1155. doi: 10.3390/mi13071155.
A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10, with a waveguide loss of approximately 0.28 dB/cm. For a resonator with 1.5-μm-wide waveguides, the average Q-factor reaches 1.20 × 10, and the waveguide loss is 0.27 dB/cm. Moreover, we theoretically and experimentally show that a reduction in the waveguide loss significantly improves the conversion efficiency of four-wave mixing. A high four-wave mixing conversion efficiency of -17.0 dB is achieved at a pump power of 6.50 dBm.
采用回流光刻胶和氧化平滑工艺，基于多模肋形波导制造超高Q值硅微环谐振器。在1550nm附近的很宽波长范围内，波导宽度为1.2μm的环的平均品质因数高达1.17×10，波导损耗约为0.28dB/cm。对于波导宽度为1.5μm的谐振器，平均品质因数达到1.20×10，波导损耗为0.27dB/cm。此外，我们从理论和实验上表明，波导损耗的降低显著提高了四波混频的转换效率。在泵浦功率为6.50dBm时，实现了-17.0dB的高四波混频转换效率。
