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分子束外延法生长石墨烯:元素 C 物种在岛状结构上的脱附、扩散和插入作用的相互作用。

Graphene growth by molecular beam epitaxy: an interplay between desorption, diffusion and intercalation of elemental C species on islands.

机构信息

Physics Department, University of Trieste, Via Valerio 2, 34127 Trieste, Italy.

出版信息

Nanoscale. 2018 Apr 26;10(16):7396-7406. doi: 10.1039/c8nr00615f.

Abstract

The growth of graphene by molecular beam epitaxy from an elemental carbon precursor is a very promising technique to overcome some of the main limitations of the chemical vapour deposition approach, such as the possibility to synthesize graphene directly on a wide variety of surfaces including semiconductors and insulators. However, while the individual steps of the chemical vapour deposition growth process have been extensively studied for several surfaces, such knowledge is still missing for the case of molecular beam epitaxy, even though it is a key ingredient to optimise its performance and effectiveness. In this work, we have performed a combined experimental and theoretical study comparing the growth rate of the molecular beam epitaxy and chemical vapour deposition processes on the prototypical Ir (111) surface. In particular, by employing high-resolution fast X-ray photoelectron spectroscopy, we were able to follow the growth of both single- and multi-layer graphene in real time, and to identify the spectroscopic fingerprints of the different C layers. Our experiments, supported by density functional theory calculations, highlight the role of the interaction between different C precursor species and the growing graphene flakes on the growth rate of graphene. These results provide an overview of the main differences between chemical vapour deposition and molecular beam epitaxy growth and thus on the main parameters which can be tuned to optimise growth conditions.

摘要

通过元素碳前体的分子束外延生长石墨烯是克服化学气相沉积方法主要限制的一种很有前途的技术,例如有可能直接在包括半导体和绝缘体在内的各种表面上合成石墨烯。然而,虽然已经对几种表面的化学气相沉积生长过程的各个步骤进行了广泛研究,但对于分子束外延的情况,仍然缺乏这种知识,尽管这是优化其性能和效果的关键因素。在这项工作中,我们通过比较分子束外延和化学气相沉积过程在典型 Ir(111)表面上的生长速率,进行了实验和理论相结合的研究。特别地,通过使用高分辨率快速 X 射线光电子能谱,我们能够实时跟踪单层和多层石墨烯的生长,并确定不同 C 层的光谱特征。我们的实验得到了密度泛函理论计算的支持,突出了不同 C 前体物质与生长的石墨烯薄片之间的相互作用对石墨烯生长速率的作用。这些结果概述了化学气相沉积和分子束外延生长之间的主要区别,以及可以优化生长条件的主要参数。

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