Electronics Technology Group, Technische Universität Ilmenau, IMN MacroNano®, 98693 Ilmenau, Germany.
Nano-Biosystems Technology Group, Technische Universität Ilmenau, IMN MacroNano®, 98693 Ilmenau, Germany.
Biosensors (Basel). 2018 Apr 5;8(2):37. doi: 10.3390/bios8020037.
Multi-electrode arrays find application in electrophysiological recordings. The quality of the captured signals depends on the interfacial contact between electrogenic cells and the electronic system. Therefore, it requires reliable low-impedance electrodes. Low-temperature cofired ceramic technology offers a suitable platform for rapid prototyping of biological reactors and can provide both stable fluid supply and integrated bio-hardware interfaces for recordings in electrogenic cell cultures. The 3D assembly of thick film gold electrodes in in vitro bio-reactors has been demonstrated for neuronal recordings. However, especially when dimensions become small, their performance varies strongly. This work investigates the influence of different coatings on thick film gold electrodes with regard to their influence on impedance behavior.
PSS layer, titanium oxynitride and laminin coatings are deposited on LTCC gold electrodes using different 2D and 3D MEA chip designs. Their impedance characteristics are compared and discussed. Titanium oxynitride layers emerged as suitable functionalization. Small 86-µm-electrodes have a serial resistance R of 32 kOhm and serial capacitance C of 4.1 pF at 1 kHz. Thick film gold electrodes with such coatings are thus qualified for signal recording in 3-dimensional in vitro cell cultures.
多电极阵列在电生理记录中得到应用。捕获信号的质量取决于生电细胞与电子系统之间的界面接触。因此,需要可靠的低阻抗电极。低温共烧陶瓷技术为生物反应器的快速原型制作提供了一个合适的平台,可为生电细胞培养中的记录提供稳定的流体供应和集成的生物硬件接口。已经证明了在体外生物反应器中使用厚膜金电极的 3D 组装用于神经元记录。然而,尤其是当尺寸变得很小时,它们的性能变化很大。这项工作研究了不同涂层对厚膜金电极的影响,以及它们对阻抗行为的影响。
PSS 层、氮化钛氧和层粘连蛋白涂层使用不同的 2D 和 3D MEA 芯片设计沉积在 LTCC 金电极上。比较和讨论了它们的阻抗特性。氮化钛氧层被证明是合适的功能化层。小的 86-µm 电极在 1 kHz 时的串联电阻 R 为 32 kOhm,串联电容 C 为 4.1 pF。具有这种涂层的厚膜金电极因此有资格用于三维体外细胞培养中的信号记录。