Kim Jungyoon, Ganorkar Shraddha, Choi Jinnil, Kim Young-Hwan, Kim Seong-II
J Nanosci Nanotechnol. 2017 Jan;17(1):761-65. doi: 10.1166/jnn.2017.12572.
Anodic Aluminum Oxide (AAO) is one of the most favorable candidates for fabrication of nano-meshed membrane for various applications due to its controllable pore size and self-ordered structure. The mechanism of AAO membrane is a simple and has been studied by many research groups, however the actual fabrication of membrane has several difficulties owing to its sensitivity of ordering, long anodizing time and unclearness of the pore. In this work, we have demonstrated enhanced process of fabrication symmetric AAO membrane by using “hybrid anodizing” (Hyb-A) method which include mild anodization (MA) followed by hard anodization (HA). This Hyb-A process can give highly ordered membrane with more vivid pore than two-step anodizing process. HA was implemented on the Al plate which has been already textured by MA for more ordered structure and HA plays a key role for formation of more obvious pore in Hyb-A. Our experimental results indicate that Hyb-A with proper process sequence would be one of the fast and useful fabrication methods for the AAO membrane.
阳极氧化铝（AAO）因其可控的孔径和自有序结构，是制造适用于各种应用的纳米网状膜的最理想候选材料之一。AAO膜的形成机制较为简单，许多研究小组都对其进行过研究，然而，由于其有序性敏感、阳极氧化时间长以及孔结构不清晰，膜的实际制备存在一些困难。在这项工作中，我们展示了一种通过“混合阳极氧化”（Hyb-A）方法来增强对称AAO膜制备过程，该方法包括先进行温和阳极氧化（MA），然后进行硬阳极氧化（HA）。这种Hyb-A工艺能够制备出比两步阳极氧化工艺具有更清晰孔结构的高度有序的膜。HA是在已经经过MA处理而具有纹理的铝板上进行的，以获得更有序的结构，并且HA在Hyb-A中对于形成更明显的孔起着关键作用。我们的实验结果表明，具有适当工艺顺序的Hyb-A将是一种快速且有用的AAO膜制备方法。
