Luu Tran Trung, Scagnoli Valerio, Saha Susmita, Heyderman Laura J, Wörner Hans Jakob
Opt Lett. 2018 Apr 15;43(8):1790-1793. doi: 10.1364/OL.43.001790.
Coherent extreme ultraviolet (EUV) radiation using high-harmonic generation (HHG) in α-quartz is demonstrated from 10 to 200 kHz, using 50 fs laser pulses at the center wavelength of 1030 nm. The EUV radiation extends beyond 25 eV in the nondamaging regime. The number of photons generated in a single harmonic order at 15.6 eV is measured to be ≈(3.5±2.5)×10 per second which, to the best of our knowledge, is a first and record value reported to date using EUV HHG from solids. This Letter demonstrates one of the first all-solid-state EUV sources based on industrial-grade fiber lasers, enabling the possibility of bringing reliable EUV sources to the mass market.
利用中心波长为1030nm的50飞秒激光脉冲，在α-石英中通过高次谐波产生（HHG）实现了10至200kHz的相干极紫外（EUV）辐射。EUV辐射在无损状态下延伸至超过25eV。在15.6eV的单个谐波阶次中产生的光子数经测量约为每秒(3.5±2.5)×10个，据我们所知，这是迄今为止使用固体EUV HHG报道的首个也是记录值。本信函展示了首个基于工业级光纤激光器的全固态EUV光源之一，使得将可靠的EUV光源推向大众市场成为可能。
