Generation of coherent extreme ultraviolet radiation from α-quartz using 50 fs laser pulses at a 1030 nm wavelength and high repetition rates.

Coherent extreme ultraviolet (EUV) radiation using high-harmonic generation (HHG) in α-quartz is demonstrated from 10 to 200 kHz, using 50 fs laser pulses at the center wavelength of 1030 nm. The EUV radiation extends beyond 25 eV in the nondamaging regime. The number of photons generated in a single harmonic order at 15.6 eV is measured to be ≈(3.5±2.5)×10 per second which, to the best of our knowledge, is a first and record value reported to date using EUV HHG from solids. This Letter demonstrates one of the first all-solid-state EUV sources based on industrial-grade fiber lasers, enabling the possibility of bringing reliable EUV sources to the mass market.