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分子束外延法制备的单晶碲化锑薄膜:二维材料异质结构的选择性生长和接触电阻降低。

Single-Crystal Antimonene Films Prepared by Molecular Beam Epitaxy: Selective Growth and Contact Resistance Reduction of the 2D Material Heterostructure.

机构信息

Graduate Institute of Electronics Engineering , National Taiwan University , No. 1, Sec. 4, Roosevelt Rd. , Taipei 10617 , Taiwan.

Research Center for Applied Sciences , Academia Sinica , No. 128, Sec. 2, Academia Rd. , Taipei 11529 , Taiwan.

出版信息

ACS Appl Mater Interfaces. 2018 May 2;10(17):15058-15064. doi: 10.1021/acsami.8b02394. Epub 2018 Apr 17.

DOI:10.1021/acsami.8b02394
PMID:29652480
Abstract

Single-crystal antimonene flakes are observed on sapphire substrates after the postgrowth annealing procedure of amorphous antimony (Sb) droplets prepared by using molecular beam epitaxy at room temperature. The large wetting angles of the antimonene flakes to the sapphire substrate suggest that an alternate substrate should be adopted to obtain a continuous antimonene film. By using a bilayer MoS/sapphire sample as the new substrate, a continuous and single-crystal antimonene film is obtained at a low growth temperature of 200 °C. The results are consistent with the theoretical prediction of the lower interface energy between antimonene and MoS. The different interface energies of antimonene between sapphire and MoS surfaces lead to the selective growth of antimonene only atop MoS surfaces on a prepatterned MoS/sapphire substrate. With similar sheet resistance to graphene, it is possible to use antimonene as the contact metal of 2D material devices. Compared with Au/Ti electrodes, a specific contact resistance reduction up to 3 orders of magnitude is observed by using the multilayer antimonene as the contact metal to MoS. The lower contact resistance, the lower growth temperature, and the preferential growth to other 2D materials have made antimonene a promising candidate as the contact metal for 2D material devices.

摘要

在使用分子束外延法在室温下制备的非晶态锑(Sb)液滴进行后生长退火处理后,在蓝宝石衬底上观察到单晶的锑烯薄片。锑烯薄片对蓝宝石衬底的大润湿角表明,应该采用交替衬底来获得连续的锑烯薄膜。通过使用双层 MoS/蓝宝石样品作为新的衬底,在 200°C 的低生长温度下获得了连续的单晶锑烯薄膜。结果与锑烯和 MoS 之间较低的界面能的理论预测一致。锑烯在蓝宝石和 MoS 表面之间的不同界面能导致锑烯仅在预图案化的 MoS/蓝宝石衬底上的 MoS 表面上选择性生长。由于与石墨烯具有相似的片电阻,因此可以将锑烯用作二维材料器件的接触金属。与 Au/Ti 电极相比,通过使用多层锑烯作为接触金属至 MoS,观察到特定接触电阻降低了 3 个数量级。较低的接触电阻、较低的生长温度和对其他二维材料的优先生长使得锑烯成为二维材料器件接触金属的有前途的候选材料。

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