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平面栅石墨烯晶体管,具有外延生长的二硫化钼钝化层。

In-plane gate graphene transistor with epitaxially grown molybdenum disulfide passivation layers.

机构信息

Research Center for Applied Sciences, Academia Sinica, 128 Academia Road, Section 2, Nankang, Taipei, 11529, Taiwan.

Institute of Microelectronics, National Cheng Kung University, No.1, University Road, Tainan City, 701, Taiwan.

出版信息

Sci Rep. 2023 Jun 6;13(1):9197. doi: 10.1038/s41598-023-36405-9.

Abstract

We demonstrate in-plane gate transistors based on the molybdenum disulfide (MoS)/graphene hetero-structure. The graphene works as channels while MoS functions as passivation layers. The weak hysteresis of the device suggests that the MoS layer can effectively passivate the graphene channel. The characteristics of devices with and without removal of MoS between electrodes and graphene are also compared. The device with direct electrode/graphene contact shows a reduced contact resistance, increased drain current, and enhanced field-effect mobility. The higher field-effect mobility than that obtained through Hall measurement indicates that more carriers are present in the channel, rendering it more conductive.

摘要

我们展示了基于二硫化钼 (MoS)/石墨烯异质结构的平面栅晶体管。石墨烯作为沟道,而 MoS 作为钝化层。器件的弱滞后现象表明 MoS 层可以有效地钝化石墨烯沟道。我们还比较了电极和石墨烯之间有和没有去除 MoS 的器件特性。具有直接电极/石墨烯接触的器件显示出减小的接触电阻、增加的漏极电流和增强的场效应迁移率。比通过霍尔测量获得的更高的场效应迁移率表明沟道中存在更多的载流子,使其更具导电性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/03a4/10244327/19c1803db791/41598_2023_36405_Fig1_HTML.jpg

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