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动态“扫描模式”半月板限制电沉积及可单独寻址的超导铜线阵列微图案化

Dynamic "Scanning-Mode" Meniscus Confined Electrodepositing and Micropatterning of Individually Addressable Ultraconductive Copper Line Arrays.

作者信息

Lei Yu, Zhang Xianyun, Xu Dingding, Yu Minfeng, Yi Zhiran, Li Zhixiang, Sun Aihua, Xu Gaojie, Cui Ping, Guo Jianjun

机构信息

Zhejiang Key Laboratory of Additive Manufacturing Materials, Ningbo Institute of Materials Technology & Engineering , Chinese Academy of Sciences , Ningbo , 315201 , People's Republic of China.

School of Materials Science and Engineering , Shanghai University , Shanghai 200444 , People's Republic of China.

出版信息

J Phys Chem Lett. 2018 May 3;9(9):2380-2387. doi: 10.1021/acs.jpclett.8b00636. Epub 2018 Apr 24.

Abstract

Micro- and nanopatterning of cost-effective addressable metallic nanostructures has been a long endeavor in terms of both scientific understanding and industrial needs. Herein, a simple and efficient dynamic meniscus-confined electrodeposition (MCED) technique for precisely positioned copper line micropatterns with superior electrical conductivity (greater than 1.57 × 10 S/cm) on glass, silicon, and gold substrates is reported. An unexpected higher printing speed in the evaporative regime is realized for precisely positioned copper lines patterns with uniform width and height under horizontal scanning-mode. The final line height and width depend on the typical behavior of traditional flow coating process, while the surface morphologies and roughness are mainly governed by evaporation-driven electrocrystallization dynamics near the receding moving contact line. Integrated 3D structures and a rapid prototyping of 3D hot-wire anemometer are further demonstrated, which is very important for the freedom integration applications in advanced conceptual devices, such as miniaturized electronics and biomedical sensors and actuators.

摘要

从科学理解和工业需求两方面来看,对具有成本效益的可寻址金属纳米结构进行微纳图案化一直是一项长期的努力。在此,报道了一种简单高效的动态弯月面限制电沉积(MCED)技术,用于在玻璃、硅和金基板上精确制备具有优异导电性(大于1.57×10 S/cm)的铜线微图案。在水平扫描模式下,对于具有均匀宽度和高度的精确放置的铜线图案,在蒸发 regime 中实现了意想不到的更高印刷速度。最终的线高和线宽取决于传统流涂工艺的典型行为,而表面形貌和粗糙度主要由后退移动接触线附近的蒸发驱动电结晶动力学控制。进一步展示了集成3D结构和3D热线风速仪的快速原型制作,这对于在先进概念设备(如小型化电子设备、生物医学传感器和致动器)中的自由集成应用非常重要。

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