Department of Electrical and Computer Engineering , Boston University , Boston , Massachusetts 02215 , United States.
Department of Mechanical Engineering , Boston University , Boston , Massachusetts 02215 , United States.
Nano Lett. 2018 May 9;18(5):2802-2806. doi: 10.1021/acs.nanolett.7b05042. Epub 2018 Apr 23.
The fabrication of metallic electromagnetic meta-atoms on a soft microstructured polymer scaffold using a MEMS-based stencil lithography technique is demonstrated. Using this technique, complex metasurfaces that are generally impossible to fabricate with traditional photolithographic techniques are created. By engineering the mechanical deformation of the polymer scaffold, the metasurface reflectivity in the mid-infrared can be tuned by the application of moderate strains.
采用基于 MEMS 的模板光刻技术在软微结构聚合物支架上制造金属电磁亚原子结构。使用这种技术，可以制造出通常无法使用传统光刻技术制造的复杂超表面。通过工程化设计聚合物支架的机械变形，可以通过施加适度的应变来调节中红外的亚表面反射率。
