He Shaowei, Yang Huimin, Jiang Yunhui, Deng Wenjun, Zhu Weiming
School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.
Micromachines (Basel). 2019 Jul 31;10(8):505. doi: 10.3390/mi10080505.
The electromagnetic (EM) properties of metasurfaces depend on both structural design and material properties. microelectromechanical systems (MEMS) technology offers an approach for tuning metasurface EM properties by structural reconfiguration. In the past 10 years, vast applications have been demonstrated based on MEMS metasurfaces, which proved to have merits including, large tunability, fast speed, small size, light weight, capability of dense integration, and compatibility of cost-effective fabrication process. Here, recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed. As an example, the pros and cons of MEMS metasurfaces for tunable lens applications are discussed and compared with traditional tunable lens technologies followed by the summary and outlook.
超表面的电磁（EM）特性取决于结构设计和材料特性。微机电系统（MEMS）技术提供了一种通过结构重构来调节超表面EM特性的方法。在过去十年中，基于MEMS超表面的大量应用已经得到展示，这些应用被证明具有包括大可调性、快速速度、小尺寸、轻重量、密集集成能力以及经济高效制造工艺兼容性等优点。在此，基于调节机制、工作频段和调节速度，对MEMS超表面应用的最新进展进行了综述和分类。作为一个例子，讨论了用于可调谐透镜应用的MEMS超表面的优缺点，并与传统可调谐透镜技术进行了比较，随后进行了总结和展望。
